MEMORY CELL STRUCTURES
In an example, a memory cell may have an interface dielectric adjacent to a semiconductor, a tunnel dielectric adjacent to the interface dielectric, a charge trap adjacent to the tunnel dielectric, a blocking dielectric adjacent to the charge trap, and a control gate adjacent to the blocking dielectric.
1 . A memory cell, comprising:
an interface dielectric adjacent to a semiconductor;
a tunnel dielectric adjacent to the interface dielectric;
a charge trap adjacent to the tunnel dielectric;
a blocking dielectric adjacent to the charge trap;
a control gate adjacent to the blocking dielectric; and
a storage dielectric between the tunnel dielectric and the charge trap.
2 . The memory cell of claim 1 , further comprising an interface metallic between the blocking dielectric and the control gate.
3 . The memory cell of claim 1 , wherein the tunnel dielectric and the blocking dielectric are of the same material.
4 . The memory cell of claim 3 , wherein the blocking dielectric is thicker than the tunnel dielectric.
5 . The memory cell of claim 1 , wherein the interface dielectric is to allow charges to pass therethrough by direct tunneling.
6 . The memory cell of claim 1 , wherein the tunnel dielectric is to accelerate charges from the interface dielectric to the charge trap.
7 . The memory cell of claim 1 , wherein the interface dielectric comprises oxygen-rich silicon oxynitride, the tunnel dielectric comprises hafnium tantalum oxynitride, the charge trap comprises gallium nitride, and the blocking dielectric comprises hafnium tantalum oxynitride.
8 - 23 . (canceled)
24 . The memory cell of claim 1 , wherein the interface dielectric is oxygen-rich silicon oxynitride and is in direct physical contact with the semiconductor.
25 . The memory cell of claim 24 , wherein the interface dielectric is between the semiconductor and the tunnel dielectric.
26 . The memory cell of claim 24 , wherein the tunnel dielectric is in direct physical contact with the interface dielectric.
27 . The memory cell of claim 26 , wherein tunnel dielectric is hafnium tantalum oxynitride.
28 . The memory cell of claim 1 , wherein the tunnel dielectric is thicker than the interface dielectric.
29 . The memory cell of claim 1 , wherein the storage dielectric is injector silicon-rich nitride.
30 . The memory cell of claim 2 , wherein the interface metallic is tantalum nitride.
31 . A method of forming a memory cell, comprising:
forming an interface dielectric adjacent to a semiconductor;
forming a tunnel dielectric adjacent to the interface dielectric;
forming a charge trap adjacent to the tunnel dielectric;
forming a blocking dielectric adjacent to the charge trap;
forming a control gate adjacent to the blocking dielectric; and
forming a storage dielectric between the tunnel dielectric and the charge trap.
32 . The method of claim 31 , further comprising forming an interface metallic between the blocking dielectric and the control gate.
33 . The method of claim 32 , wherein forming the interface metallic between the blocking dielectric and the control gate comprises forming tantalum nitride between the blocking dielectric and the control gate.
34 . The method of claim 31 , wherein forming the interface dielectric adjacent to the semiconductor comprises forming oxygen-rich silicon oxynitride in direct physical contact with the semiconductor.
35 . The method of claim 31 , wherein forming the storage dielectric between the tunnel dielectric and the charge trap comprises forming injector silicon-rich nitride between the tunnel dielectric and the charge trap.