Multifunctional memory cells
The present disclosure includes multifunctional memory cells. A number of embodiments include a gate element, a charge transport element, a first charge storage element configured to store a first charge transported from the gate element and through the charge transport element, wherein the first charge storage element includes a nitride material, and a second charge storage element configured to store a second charge transported from the gate element and through the charge transport element, wherein the second charge storage element includes a gallium nitride material.
1. A memory cell, comprising:
a gate element;
a charge transport element;
a first charge storage element configured to store a first charge transported from the gate element and through the charge transport element, wherein the first charge storage element includes a nitride material; and
a second charge storage element configured to store a second charge transported from the gate element and through the charge transport element, wherein the second charge storage element includes a gallium nitride material.
2. The memory cell of claim 1 , wherein:
the first charge storage element is a volatile charge storage element; and
the second charge storage element is a non-volatile charge storage element.
3. The memory cell of claim 1 , wherein:
the first charge storage element is a first non-volatile charge storage element; and
the second charge storage element is a second non-volatile charge storage element.
4. The memory cell of claim 1 , wherein the charge transport element includes a silicon-rich nitride material.
5. The memory cell of claim 1 , wherein the charge transport element includes a hafnium oxynitride material.
6. The memory cell of claim 1 , wherein the gate element includes a tantalum nitride material.
7. The memory cell of claim 1 , wherein the second charge storage element includes a silicon-rich nitride material.
8. A method of operating a memory cell, comprising:
transporting a charge from a gate element of the memory cell through a charge transport element of the memory cell to:
a first charge storage element of the memory cell having a nitride material; or
a second charge storage element of the memory cell having a gallium nitride material; and
storing, by the charge storage element to which the charge is transported, the charge.
9. The method of claim 8 , wherein the method includes, subsequent to storing the charge:
transporting the charge from the charge storage element in which the charge is stored through the charge transport element to the gate element.
10. The method of claim 8 , wherein transporting the charge through the charge transport element includes tunneling an electron through the charge transport element.
11. The method of claim 8 , wherein the method includes transporting the charge from the gate element through the charge transport element during a program operation performed on the memory cell.
12. The method of claim 8 , wherein transporting the charge through the charge transport element includes transporting the charge through a progressive band offset tunnel barrier.
13. A memory cell, comprising:
a gate element;
a charge transport element;
a plurality of charge storage elements, wherein:
each respective charge storage element is configured to store a charge transported from the gate element and through the charge transport element to that respective charge storage element; and
each respective charge storage element includes a nitride material and a silicon-rich nitride material; and
an additional charge storage element, wherein the additional charge storage element includes a gallium nitride material.
14. The memory cell of claim 13 , wherein the memory cell includes a charge blocking element configured to prevent leakage of the charge stored by each respective charge storage element, wherein the charge blocking element includes:
a hafnium oxynitride material; and
a silicon dioxide material.
15. The memory cell of claim 13 , wherein the nitride material of each respective charge storage element is a silicon oxynitride material.
16. The memory cell of claim 13 , wherein the charge transport element includes:
a hafnium oxynitride material; and
an oxide material.
17. The memory cell of claim 16 , wherein the charge transport element includes an oxygen-rich silicon oxynitride material.
18. The memory cell of claim 16 , wherein the charge transport element includes a silicon-rich nitride material.
19. A memory cell, comprising:
a gate element;
a charge transport element adjacent the gate element;
a volatile charge storage element configured to store a first charge transported from the gate element and through the charge transport element, wherein the volatile charge storage element includes a nitride material;
a non-volatile charge storage element configured to store a second charge transported from the gate element and through the charge transport element, wherein the non-volatile charge storage element includes a gallium nitride material; and
a charge blocking element configured to prevent leakage of the first charge stored by the volatile charge storage element and leakage of the second charge stored by the non-volatile storage element.
20. The memory cell of claim 19 , wherein the memory cell includes a silicon substrate element adjacent the charge blocking element.
21. The memory cell of claim 19 , wherein the charge blocking element includes:
a hafnium oxynitride material; and
an oxygen-rich silicon oxynitride material.
22. The memory cell of claim 21 , wherein the charge blocking element includes:
a silicon-rich nitride material; and
an aluminum oxide material.
23. The memory cell of claim 19 , wherein the charge blocking element includes:
a hafnium oxynitride material; and
an oxide material.
24. The memory cell of claim 19 , wherein the charge transport element includes:
a hafnium oxynitride material; and
a silicon-rich nitride material.
25. The memory cell of claim 24 , wherein the charge transport element includes:
an additional silicon-rich nitride material; and
a nitride material.