Memory cells including dielectric materials, memory devices including the memory cells, and methods of forming same
View Patent ↗A memory cell comprising a threshold switching material over a first electrode on a substrate. The memory cell includes a second electrode over the threshold switching material and at least one dielectric material between the threshold switching material and at least one of the first electrode and the second electrode. A memory material overlies the second electrode. The dielectric material may directly contact the threshold switching material and each of the first electrode and the second electrode. Memory cells including only one dielectric material between the threshold switching material and an electrode are disclosed. A memory device including the memory cells and methods of forming the memory cells are also described.
1. A memory cell, comprising:
a threshold switching material comprising amorphous silicon doped with at least one of boron, aluminum, gallium, or phosphorus;
at least one doped dielectric material between the threshold switching material and at least one electrode of a pair of electrodes, the threshold switching material on a side of the at least one doped dielectric material; and
a memory material on a side of one of the electrodes of the pair of electrodes.
2. The memory cell of claim 1 , wherein the threshold switching material comprises greater than about 90 atomic percent amorphous silicon.
3. The memory cell of claim 1 , wherein the at least one doped dielectric material directly contacts the threshold switching material and the at least one electrode of the pair of electrodes.
4. The memory cell of claim 1 , wherein the memory material comprises a transition metal oxide, a transition metal, an alkaline earth metal, a rare earth metal, a chalcogenide, a binary metal oxide, a colossal magnetoresistive material, a polymer-based resistive material, or combinations thereof.
5. The memory cell of claim 1 , wherein the memory material comprises a chalcogenide material.
6. The memory cell of claim 1 , wherein the at least one doped dielectric material comprises aluminum oxide, aluminum silicon oxide, magnesium oxide strontium oxide, barium oxide, lanthanum oxide, lutetium oxide, dysprosium scandium oxide, strontium titanium oxide, aluminum oxynitride, and combinations thereof.
7. The memory cell of claim 1 , wherein a first side of the threshold switching material directly contacts a first doped dielectric material and a second side of the threshold switching material directly contacts a second doped dielectric material.
8. A memory cell, comprising:
a threshold switching material comprising amorphous silicon between a pair of electrodes;
a first doped dielectric material between the threshold switching material and a first electrode of the pair of electrodes, the threshold switching material over the first doped dielectric material;
a second doped dielectric material between the threshold switching material and a second electrode of the pair of electrodes; and
a memory material adjacent at least one of the electrodes of the pair of electrodes.
9. The memory cell of claim 8 , wherein the threshold switching material is doped with at least one of boron, aluminum, gallium, phosphorus, or nitrogen.
10. The memory cell of claim 8 , wherein the threshold switching material is doped with at least one of carbon, oxygen, and nitrogen.
11. The memory cell of claim 8 , wherein the at least one of the first doped dielectric material and the second doped dielectric material comprises a dielectric material doped with oxygen, sulfur, carbon, fluorine, and combinations thereof.
12. The memory cell of claim 8 , wherein at least one of the first doped dielectric material and the second doped dielectric material comprises a dielectric material doped with metallic elements.
13. The memory cell of claim 8 , wherein the second electrode of the pair of electrodes contacts the memory material.
14. A semiconductor device, comprising:
digit lines over word lines; and
memory cells arranged in rows and columns, each memory cell between a respective word line and a respective digit line and comprising:
a threshold switching material comprising amorphous silicon over a first electrode;
a second electrode over the threshold switching material;
a dielectric material comprising aluminum silicon oxide, strontium oxide, barium oxide, strontium titanium oxide, or combinations thereof between the threshold switching material and at least one of the first electrode or the second electrode; and
a memory material over the second electrode.
15. The semiconductor device of claim 14 , wherein the threshold switching material is doped.
16. The semiconductor device of claim 14 , wherein the first electrode and the second electrode comprise a metal material, a metal silicide, or polysilicon.