Strained semiconductor device
View Patent ↗A semiconductor device comprises a first semiconductor fin having a first width, the first semiconductor fin is arranged on a first portion of the strain relaxation buffer layer, where the first portion of the strain relaxation buffer layer has a second width and a second semiconductor fin having a width substantially similar to the first width, the second semiconductor fin is arranged on a second portion of the strain relaxation buffer layer, where the second portion of the strain relaxation buffer layer has a third width. A gate stack is arranged over a channel region of the first fin and a channel region of the second fin.
1. A method for forming a semiconductor device, the method comprising:
forming a strain relaxation buffer layer on a substrate;
forming a tensile strained layer on a first portion of the strain relaxation buffer layer and a compressive strained layer on a second portion of the strain relaxation buffer layer;
forming a pad layer on the tensile strained layer and the compressive strained layer;
forming a layer of semiconductor material on the pad layer;
implanting ions in a portion of the layer of semiconductor material to form a doped portion of the layer of semiconductor material;
removing portions of the layer of semiconductor material to form a first mandrel comprising the layer of semiconductor material, and a second mandrel comprising the doped portion of the layer of semiconductor material;
forming an oxide layer on the first mandrel and an oxide layer on the second mandrel, where the oxide layer on the first mandrel has a thickness that is less than the oxide layer on the second mandrel;
removing portions of the oxide layer on the first mandrel to expose a portion of the first mandrel and removing portions of the oxide layer on the second mandrel to expose a portion of the second mandrel;
removing the first mandrel and the second mandrel to expose portions of the pad layer;
removing exposed portions of the pad layer, the tensile strained layer and the compressive strained layer to form a first fin and a second fin, wherein the first fin and the second fin have substantially similar widths; and
forming a gate stack over a channel region of the first fin and a channel region of the second fin.
2. The method of claim 1 , wherein the strain relaxation buffer layer includes silicon germanium.
3. The method of claim 1 , wherein the tensile strained layer includes an epitaxially grown silicon material.
4. The method of claim 1 , wherein the compressive strained layer includes an epitaxially grown silicon germanium material.
5. The method of claim 1 , wherein the layer of semiconductor material includes amorphous silicon.
6. The method of claim 1 wherein the implanting ions in a portion of the layer of semiconductor material includes patterning a mask over the tensile strained layer.
7. The method of claim 1 wherein the implanting ions in a portion of the layer of semiconductor material includes implanting ions in the layer of semiconductor material over the compressive strained layer.
8. The method of claim 1 , wherein the first fin includes the tensile strained layer material and the second fin includes the compressive strained semiconductor material.
9. The method of claim 1 , wherein the strain relaxation buffer layer is an epitaxial layer.
10. The method of claim 1 , wherein the strain relaxation buffer layer includes a concentration of germanium.
11. The method of claim 1 , wherein the tensile strained layer is different from the compressive strained layer.
12. The method of claim 1 , wherein the substrate includes silicon.
13. The method of claim 1 , wherein the substrate includes silicon carbide.
14. The method of claim 1 , wherein the substrate includes silicon-germanium-carbon.