Coating compositions suitable for use with an overcoated photoresist
View Patent ↗In one aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. In another aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise a component comprising a hydroxyl-naphthoic group, such as a 6-hydroxy-2-naphthoic group Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
1. An antireflective composition for use with an overcoated photoresist, the antireflective composition comprising:
a resin comprising a Diets Alder reaction product; and
a component comprising a hydroxyl-naphthoic group.
2. The composition of claim 1 wherein the antireflective composition resin comprises a reaction product of an imide-containing dienophile and a polycyclic aromatic group.
3. The composition of claim 1 wherein the antireflective composition resin comprises a reaction product of (1) an imide-containing dienophile and (2) an anthraecene or pentacene group.
4. The composition of claim 1 which comprises a compound that comprises one or more repeat units that comprise one or more groups of the following formulae:
wherein in the above formulae each R is independently hydrogen or a non-hydrogen substitutent.
5. The composition of claim 1 wherein the composition comprises a resin that comprises one or more repeat units that comprise one or more groups of the following formulae:
wherein in the above formulae each R is independently hydrogen or a non-hydrogen substitutent.
6. The composition of claim 1 wherein the coating composition comprises a resin comprising a 6-hydroxy-2-naphthoic group.
7. The composition of claim 1 wherein the composition comprises a resin that comprises moieties that comprises (i) a reaction product of a diene and a dienophile and (ii) a hydroxyl-naphthoic group.