Integrated circuit and semiconductor device
In one embodiment, the standard cell includes first and second active regions defining an intermediate region between the first and second active regions; and first, second and third gate lines crossing the first and second active regions and crossing the intermediate region. The first gate line is divided into an upper first gate line and a lower first gate line by a first gap insulating layer in the intermediate region, the second gate line is undivided, and the third gate line is divided into an upper third gate line and a lower third gate line by a second gap insulating layer in the intermediate region.
1. A standard cell, comprising:
first and second active regions defining an intermediate region between the first and second active regions; and
first, second and third gate lines crossing the first and second active regions and crossing the intermediate region, the first gate line divided into an upper first gate line and a lower first gate line by a first gap insulating layer in the intermediate region, the second gate line being undivided, and the third gate line divided into an upper third gate line and a lower third gate line by a second gap insulating layer in the intermediate region, wherein
the upper first gate line is connected to the lower third gate line, and
the second gate line is between the first gate line and the third gate line.
2. The standard cell of claim 1 , wherein
the first and second active regions extend along a first direction and are arranged along a second direction in parallel, and the second direction is perpendicular to the first direction.
3. The standard cell of claim 2 , wherein
the first gate line, the second gate line and the third gate line extend along the second direction and are arranged along the first direction in parallel.
4. The standard cell of claim 3 , wherein
the first gap insulating layer is closer to the second active region than the first active region; and
the second gap insulating layer is closer to the first active region than the second active region.
5. The standard cell of claim 4 , further comprising:
a first interlayer insulation layer over first gate line, the second gate line and the third gate line.
6. The standard cell of claim 5 , wherein
portions of the first interlayer insulation layer form the first gap insulating layer and the second gap insulating layer.
7. The standard cell of claim 5 , wherein
the first gap insulating layer and the first interlayer insulation layer are separate layers; and
the second gap insulating layer and the first interlayer insulating layer are separate layers.
8. The standard cell of claim 4 , wherein
the first gate line, the second gate line and the third gate line are arranged along the first direction according to a pitch which is a center-to-center distance between the first gate line and the second gate line;
the first gap insulating layer has a width less than twice the pitch and greater than a width of the first gate line; and
the second gap insulating layer has a width less than twice the pitch and greater than a width of the third gate line.
9. The standard cell of claim 8 , wherein
the width of the first gap insulating layer equals the pitch; and
the width of the second gap insulating layer equals the pitch.
10. The standard cell of claim 8 , wherein
the width of the first gap insulating layer equals the width of the second gap insulating layer.
11. The standard cell of claim 8 , wherein
the width of the first gap insulating layer does not equal the width of the second gap insulating layer.
12. The standard cell of claim 4 , further comprising:
a first plurality of fins extending along the first direction in the first active region and arranged along a second direction in parallel;
a second plurality of fins extending along the first direction in the second active region and arranged along the second direction; and wherein
the first gate lines, the second gate lines and the third gate lines are over the first plurality of fins and the second plurality of fins.
13. The standard cell of claim 12 , further comprising:
a third plurality of fins extending along the first direction in the intermediate region; and wherein
the first gate lines, the second gate lines and the third gate lines are over the third plurality of fins.
14. The standard cell of claim 3 , further comprising:
a first plurality of fins extending along the first direction in the first active region and arranged along a second direction in parallel;
a second plurality of fins extending along the first direction in the second active region and arranged along the second direction; and wherein
the first gate lines, the second gate lines and the third gate lines are over the first plurality of fins and the second plurality of fins.
15. The standard cell of claim 14 , further comprising:
a third plurality of fins extending along the first direction in the intermediate region; and wherein
the first gate lines, the second gate lines and the third gate lines are over the third plurality of fins.
16. The standard cell of claim 15 , wherein
first spacers are formed along sides of the first gate line;
second spacers are formed along sides of the second gate line; and
third spacers are formed along sided of the third gate line.
17. The standard cell of claim 16 , wherein
the first spacers are formed along sides of the first gap insulating layer; and
the third spacers are formed along sides of the second gap insulating layer.
18. The standard cell of claim 14 , wherein the first gap insulating layer and the second gap insulating layer have a same width as the first and third gate lines, respectively.
19. A standard cell, comprising:
first and second active regions defining an intermediate region between the first and second active regions;
an upper first gate line crossing the first active region and a portion of the intermediate region; and
a lower first gate line crossing the second active region, the lower first gate line separated from and arranged linearly with the upper first gate line such that a first gap exists between the upper first gate line and the lower first gate line in the intermediate region, a first gap insulating layer disposed in the first gap;
a second gate line crossing the first and second active regions and continuously crossing the intermediate region;
a lower third gate line crossing the second active region and a portion of the intermediate region;
an upper third gate line crossing the first active region, the upper third gate line separated from and arranged linearly with the lower third gate line such that a second gap exists between the upper third gate line and the lower third gate line in the intermediate region, a second gap insulating layer disposed in the second gap, wherein
the upper first gate line is connected to the lower third gate line, and
the second gate line is between the upper first gate line and the lower third gate line.
20. A standard cell, comprising:
first and second active regions defining an intermediate region between the first and second active regions; and
an upper first gate line crossing the first active region and only a portion of the intermediate region;
a second gate line crossing the first and second active regions and continuously crossing the intermediate region;
a lower third gate line crossing the second active region and only a portion of the intermediate region; and
a first metal line electrically connecting the upper first gate line and the lower third gate line, wherein
the second gate line is between the upper first gate line and the lower third gate line.