Structure and method for improved stabilization of cobalt cap and/or cobalt liner in interconnects
View Patent ↗A method of fabricating a metallization layer of a semiconductor device in which copper is used for an interconnect material and cobalt is used to encapsulate the copper. A material is introduced that will interact with the cobalt to cause a hexagonal-close-packed (HCP) crystal structure of cobalt to change to a face-centered-cubic (FCC) crystal structure of cobalt, the FCC crystal structure providing a resistance of the cobalt to migrate.
1. A method, comprising, in a fabrication stage of a metallization layer of a semiconductor device in which copper is used for an interconnect material and cobalt is used to encapsulate said copper, introducing a material that will interact with said cobalt to cause a hexagonal-close-packed (HCP) crystal structure of cobalt to change to a face-centered-cubic (FCC) crystal structure of cobalt, said FCC crystal structure providing a resistance of said cobalt to migrate.
2. The method of claim 1 , wherein said introduced material comprises nickel (Ni).
3. The method of claim 1 , wherein said introduced material comprises palladium (Pd).
4. The method of claim 1 , wherein said encapsulating said copper further comprises a liner material and said introduced material inhibits a migration of cobalt into said liner.
5. The method of claim 4 , wherein said liner material comprises Ruthenium (Ru).
6. The method of claim 1 , wherein said cobalt alloy inhibits a chemical attack on cobalt, thereby protecting against a formation of divots during a chemical mechanical polishing/planarization (CMP) processing of said metallization layer.
7. The method of claim 1 , wherein said introduced material is introduced using a doped liner component used in said encapsulating said copper.
8. The method of claim 7 , wherein said liner comprises ruthenium (Ru).
9. The method of claim 1 , wherein said introduced material is introduced as an alloy seed material of said copper.
10. The method of claim 1 , wherein said encapsulating said copper comprises providing a cobalt cap on top of said copper, and said introduced material is introduced by doping said cobalt cap with said introduced material.
11. The method of claim 1 , wherein said introduced material is introduced using an electroless deposition process.
12. The method of claim 1 , wherein said encapsulating said copper further comprises a liner comprising Ruthenium (Ru) and said introduced material inhibits a migration of cobalt into said Ru liner.
13. A semiconductor chip, as fabricated using the method of claim 1 .
14. A semiconductor device comprising a semiconductor chip of claim 13 .
15. A method of inhibiting an electro-migration of copper (Cu) in copper interconnects in metallization layers of a chip, said copper interconnects encapsulated by a liner comprising cobalt (Co) and a cap comprising cobalt, said method comprising introducing a material that interacts with said cobalt to cause a hexagonal-close-packed (HCP) crystal structure of cobalt to change to a face-centered-cubic (FCC) crystal structure of cobalt, said FCC crystal structure providing a resistance of said cobalt to migrate.
16. The method of claim 15 , wherein said introduced material comprises at least one of nickel (Ni) and palladium (Pd).
17. The method of claim 15 , wherein said introduced material is introduced using a doped liner component used in said encapsulating said copper.
18. A semiconductor chip, comprising:
a substrate having a plurality of electronic component elements fabricated on a top surface thereof, in a device layer; and
a plurality of metallization layers formed successively on top of said device layer, to interconnect said electronic component elements using copper (Cu), each said metallization layer having a different interconnect pattern,
wherein said Cu in said Cu interconnect pattern in each said metallization layer is encapsulated in a layer of cobalt and wherein a material is introduced into an interconnect structure of said interconnect pattern of each said metallization layer that forms an alloy that interacts with said cobalt to cause a hexagonal-close-packed (HCP) crystal structure of cobalt to change to a face-centered-cubic (FCC) crystal structure of cobalt, said FCC crystal structure providing a resistance of said cobalt to migrate.
19. The semiconductor chip of claim 18 , wherein said introduced material comprises at least one of nickel (Ni) and palladium (Pd).
20. A semiconductor chip, comprising:
a substrate having a plurality of electronic component elements fabricated on a top surface thereof, in a device layer; and
a plurality of metallization layers formed successively on top of said device layer, to interconnect said electronic component elements using copper (Cu), each said metallization layer having a different interconnect pattern,
wherein said Cu in said Cu interconnect pattern in each said metallization layer is encapsulated in a layer of cobalt and wherein a material is introduced into an interconnect structure of at least one said interconnect pattern of at least one said metallization layer that interacts with said cobalt to cause a hexagonal-close-packed (HCP) crystal structure of cobalt to change to a face-centered-cubic (FCC) crystal structure of cobalt, said FCC crystal structure providing a resistance of said cobalt to migrate.