Package structure and method of forming package structure
A package structure includes a semiconductor device, a first molding compound, a through-via, a first dielectric layer, a first redistribution line, and a second molding compound. The first molding compound is in contact with a sidewall of the semiconductor device. The through-via is in the first molding compound and is electrically connected to the semiconductor device. The first dielectric layer is over the semiconductor device. The first redistribution line is in the first dielectric layer and is electrically connected to the semiconductor device and the through-via. The second molding compound is in contact with a sidewall of the first dielectric layer.
1. A package structure, comprising:
a semiconductor device;
a first molding compound in contact with a sidewall of the semiconductor device;
a through-via in the first molding compound and electrically connected to the semiconductor device;
first and second dielectric layers between which is the semiconductor device;
a first redistribution line in the first dielectric layer and electrically connected to the semiconductor device and the through-via; and
a second molding compound in contact with a sidewall of the first dielectric layer, wherein a thickness of the second molding compound is substantially the same as a total thickness of the first molding compound, the first dielectric layer, and the second dielectric layer.
2. The package structure of claim 1 , wherein the first molding compound is surrounded by the second molding compound.
3. The package structure of claim 1 , wherein the first molding compound is in contact with the second molding compound.
4. The package structure of claim 1 , wherein the first dielectric layer is surrounded by the second molding compound.
5. The package structure of claim 1 , wherein a thickness of the first molding compound is smaller than a thickness of the second molding compound.
6. The package structure of claim 1 ,
wherein the package structure further comprises:
a second redistribution line in the second dielectric layer and electrically connected to the semiconductor device.
7. The package structure of claim 1 , wherein the second molding compound is in contact with a sidewall of the second dielectric layer.
8. The package structure of claim 1 , wherein a bottom surface of the second dielectric layer is substantially coplanar with a bottom surface of the second molding compound.
9. The package structure of claim 1 , wherein a top surface of the first dielectric layer is substantially coplanar with a top surface of the second molding compound.
10. A package structure, comprising:
a semiconductor device;
a first molding compound in contact with a sidewall of the semiconductor device;
a through-via in the first molding compound and electrically connected to the semiconductor device;
first and second dielectric layers between which is the semiconductor device;
a first redistribution line in the first dielectric layer and electrically connected to the semiconductor device and the through-via; and
a second molding compound around only sidewalls of the first molding compound, the first dielectric layer, and the second dielectric layer, wherein the first molding compound and the second molding compound have an interface.
11. The package structure of claim 10 , wherein the second molding compound is in contact with the first dielectric layer.
12. The package structure of claim 10 , wherein the first dielectric layer and the second molding compound have an interface.
13. The package structure of claim 10 , wherein the second molding compound is free from a conductive feature.
14. A method of forming a package structure, the method comprising:
forming a through-via over a first dielectric layer, wherein the through-via is electrically connected to a redistribution line in the first dielectric layer;
disposing a semiconductor device over the first dielectric layer;
forming a first molding compound over the first dielectric layer, wherein the semiconductor device and the through-via are embedded in the first molding compound;
forming a second dielectric layer over the first molding compound; and
forming a second molding compound around the first molding compound such that the second molding compound is substantially flush with a top surface of the second dielectric layer and is on a sidewall of the first dielectric layer.
15. The method of claim 14 , further comprising:
sawing through at least the first molding compound.
16. The method of claim 15 , wherein the second molding compound is formed after the sawing.
17. The method of claim 14 , further comprising:
patterning the first dielectric layer to expose the redistribution line; and
forming a solder bump electrically connected to the redistribution line.
18. The method of claim 17 , wherein the second molding compound is formed after the forming the solder bump.
19. The method of claim 17 , further comprising:
using a die attach film to attach the first dielectric layer to a carrier before the forming the second molding compound, wherein the solder bump is embedded in the die attach film.
20. The method of claim 14 , further comprising:
sawing through the second molding compound.