Forming insulator fin structure in isolation region to support gate structures
View Patent ↗A method for forming the semiconductor device that includes forming a plurality of composite fin structures across a semiconductor substrate including an active device region and an isolation region. The composite fin structures may include a semiconductor portion over the active device region and a dielectric portion over the isolation region. A gate structure can be formed on the channel region of the fin structures that are present on the active regions of the substrate, and the gate structure is also formed on the dielectric fin structures on the isolation regions of the substrate. Epitaxial source and drain regions are formed on source and drain portions of the fin structures present on the active region, wherein the dielectric fin structures support the gate structure over the isolation regions.
1. A method for forming a semiconductor device comprising:
removing portions of a plurality of fin structures that are present on isolation regions of a substrate to form fin trenches, wherein portions of the fin structures present on active regions of the substrate remain;
forming a dielectric fin filling an entirety of a width and a height of the fin trenches adjacent to the portion of the fin structures present on the active regions of the substrate; and
forming gate structures on the channel region of the fin structures present on at least the active regions of the substrate.
2. The method of claim 1 , wherein the gate structures are also formed on the dielectric fin on the isolation regions.
3. The method of claim 2 , further comprising forming epitaxial source and drain regions on source and drain portions of the fin structures present on the active regions, wherein the dielectric fin structures support the gate structure over the isolation regions.
4. The method of claim 1 , wherein the plurality of fin structures are comprised of a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
5. The method of claim 1 , wherein forming said plurality of fin structures across the semiconductor substrate comprises spacer image transfer methods using a bulk substrate.
6. The method of claim 1 , further comprising forming of the hardmask dielectric for patterning the fin structures comprising:
depositing a dielectric material for the hardmask dielectric over the fin structures; and
planarizing the dielectric material for the hardmask dielectric so that the upper surface of the dielectric material is coplanar with the upper surface of the fin structures.
7. The method of claim 1 , wherein said removing portions of the fin structures present on the isolation regions of the substrate to form the fin trenches comprises:
forming an etch mask over the portions of the fin structures present on the active regions, wherein the portions of the fin structures over the isolation regions of the substrate are exposed; and
etching the portions of the fin structures over the isolation regions of the substrate are exposed selectively to the etch mask.
8. The method of claim 1 , wherein said forming the dielectric fin in the fin trenches comprises depositing a dielectric selected from the group consisting of silicon oxide, silicon oxynitride, aluminum oxide, hafnium oxide, silicon carbon boron nitride and combinations thereof.
9. A method for forming a semiconductor device comprising:
forming a plurality of semiconductor fin structures across a semiconductor substrate including active regions and isolation regions;
forming a hardmask dielectric on the semiconductor substrate contacting sidewalls of the semiconductor fin structure;
removing portions of the semiconductor fin structures present on the isolation regions of the substrate to form fin trenches having sidewalls defined by a hard mask, wherein portions of the semiconductor fin structures present on the active regions of the substrate remain to provide the semiconductor fin portion;
forming the dielectric fin portions filling an entirety of a width and a height of the fin trenches adjacent to the semiconductor fin portions present on the active regions of the substrate; and
forming gate structures on a channel region of the semiconductor fin portions present on at least the active regions of the substrate.
10. The method of claim 9 , wherein the semiconductor fin portions are comprised of a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
11. The method of claim 9 , wherein the dielectric fin portions are comprised of a dielectric selected from the group consisting of silicon oxide, silicon oxynitride, aluminum oxide, hafnium oxide, silicon boron carbon nitride, and combinations thereof.
12. The method of claim 9 , further forming epitaxial source and drain regions on source and drain portions of the semiconductor fin portions present on the active region, wherein the dielectric fin portions are etch resistant to etchant chemicals of the precursors employed in the forming of epitaxial source and drain regions on source and drain portions of the fin structures.
13. The method of claim 12 , wherein the epitaxial source and drain regions are merged source and drain regions extending into contact with the source and drain fin portions of adjacent fin structures.
14. The method of claim 13 , wherein the epitaxial source and drain regions are comprised a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
15. The method of claim 9 , wherein the gate structures are present on the dielectric fin portions on the isolation regions.
16. A method for forming a semiconductor device comprising:
forming dielectric fin structures overlying an isolation region of a substrate, the dielectric fin structures aligned with and in contact with semiconductor fin structures present on the active regions of the substrate, wherein the dielectric fin structures fill an entirety of a width and a height of the fin trenches adjacent to the semiconductor fin structures; and
forming gate structures on the channel region of the semiconductor fin structures present on at least the active regions of the substrate, wherien the gate structures are also in contact with the dielectric fin structures.
17. The method of claim 16 , further comprising forming epitaxial source and drain regions on source and drain portions of the semiconductor fin structures present on the active regions, wherein the dielectric fin structures support the gate structure over the isolation regions.
18. The method of claim 16 , wherein the semiconductor fin structures are comprised of a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
19. The method of claim 16 , wherein said semiconductor fin structures are formed using spacer image transfer methods using a bulk substrate.
20. The method of claim 16 , wherein the dielectric fin structures are comprised of a dielectric selected from the group consisting of silicon oxide, silicon oxynitride, aluminum oxide, hafnium oxide, silicon carbon boron nitride and combinations thereof.