IP Library Granted Patent US 10,438,839
Granted Patent B2
US 10,438,839 · App. 15/687,499 · Granted Oct 8, 2019

Methods of forming electromagnetic radiation conduits

Inventor: David H. Wells (Boise, ID)
Assignee: Micron Technology, Inc.
H01L21/764H01L21/0265H01L21/02381H01L21/02488H01L21/02532H01L21/02639H01L21/2015
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Quick Facts
Patent No.
US 10,438,839
App. No.
15/687,499
Granted
Oct 8, 2019
Kind
B2
Abstract

Some embodiments include methods of forming voids within semiconductor constructions. In some embodiments the voids may be utilized as microstructures for distributing coolant, for guiding electromagnetic radiation, or for separation and/or characterization of materials. Some embodiments include constructions having micro-structures therein which correspond to voids, conduits, insulative structures, semiconductor structures or conductive structures.

Claims (11)

1. A method of forming an electromagnetic radiation conduit, comprising:

providing exposed first and second materials on a semiconductor substrate, the second material comprising a pair of projections projecting upwardly relative to the first material and comprising sidewalls; the second material being compositionally different from the first material;

providing an exposed third material atop the second material projections, the third material being compositionally different from the second material;

growing additional first material from the exposed third material to form a bridge across the pair of second material projections; a conduit being created over the first material, between the pair of projections and under the bridge; and

at least partially filling the conduit with fourth material having different light refracting properties than one or more of the first, second and third materials.

2. The method of claim 1 wherein the fourth material comprises a metal.

3. The method of claim 1 comprising providing the third material to be compositionally the same as the first material.

4. The method of claim 3 comprising providing the first material to comprise elemental-form silicon, and wherein the growing the additional first material comprises epitaxial growth.

5. The method of claim 1 comprising providing the third material to be compositionally different from the first material.

6. The method of claim 1 comprising providing the third material to comprise elemental-form silicon.

7. The method of claim 6 comprising providing the third material to comprise elemental-form amorphous silicon.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
Continuity (5)
Division 14712219 · May 14, 2015
Division 13971169 · Aug 20, 2013
Division 11724654 · Mar 14, 2007
Continuation 11704466 · Feb 7, 2007
Related Publication 20170372942A1 · Dec 28, 2017