Methods of forming electromagnetic radiation conduits
Some embodiments include methods of forming voids within semiconductor constructions. In some embodiments the voids may be utilized as microstructures for distributing coolant, for guiding electromagnetic radiation, or for separation and/or characterization of materials. Some embodiments include constructions having micro-structures therein which correspond to voids, conduits, insulative structures, semiconductor structures or conductive structures.
1. A method of forming an electromagnetic radiation conduit, comprising:
providing exposed first and second materials on a semiconductor substrate, the second material comprising a pair of projections projecting upwardly relative to the first material and comprising sidewalls; the second material being compositionally different from the first material;
providing an exposed third material atop the second material projections, the third material being compositionally different from the second material;
growing additional first material from the exposed third material to form a bridge across the pair of second material projections; a conduit being created over the first material, between the pair of projections and under the bridge; and
at least partially filling the conduit with fourth material having different light refracting properties than one or more of the first, second and third materials.
2. The method of claim 1 wherein the fourth material comprises a metal.
3. The method of claim 1 comprising providing the third material to be compositionally the same as the first material.
4. The method of claim 3 comprising providing the first material to comprise elemental-form silicon, and wherein the growing the additional first material comprises epitaxial growth.
5. The method of claim 1 comprising providing the third material to be compositionally different from the first material.
6. The method of claim 1 comprising providing the third material to comprise elemental-form silicon.
7. The method of claim 6 comprising providing the third material to comprise elemental-form amorphous silicon.