IP Library Granted Patent US 10,504,773
Granted Patent B2
US 10,504,773 · App. 15/687,506 · Granted Dec 10, 2019

Fluorimetry systems

Inventor: David H. Wells (Boise, ID)
Assignee: Micron Technology, Inc.
H01L21/764H01L21/0265H01L21/02381H01L21/02488H01L21/02532H01L21/02639H01L21/2015
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Quick Facts
Patent No.
US 10,504,773
App. No.
15/687,506
Filed
Aug 27, 2017
Granted
Dec 10, 2019
Kind
B2
Art Unit
2893
USPC
438/478
Abstract

Some embodiments include methods of forming voids within semiconductor constructions. In some embodiments the voids may be utilized as microstructures for distributing coolant, for guiding electromagnetic radiation, or for separation and/or characterization of materials. Some embodiments include constructions having micro-structures therein which correspond to voids, conduits, insulative structures, semiconductor structures or conductive structures.

Claims (13)

1. A fluorimetry system, comprising:

a sample holder comprising:

a silicon-containing substrate;

a pair of silicon dioxide-containing projections extending upwardly from the substrate;

a silicon dioxide-containing cover extending across the projections; the substrate, projections and cover together encompassing a sample-retaining conduit;

a source of electromagnetic radiation configured to emit radiation through either the substrate, projections or the cover; and

a detector configured to detect electromagnetic radiation passing out of the sample-retaining conduit, the detector being configured to detect radiation at about 90 degrees relative to a direction along which the source emits radiation.

2. The fluorimetry system of claim 1 wherein the source is configured to emit the radiation through the substrate.

3. The fluorimetry system of claim 1 wherein the source is configured to emit the radiation through the projections.

4. The fluorimetry system of claim 1 wherein the source is configured to emit the radiation through the cover.

5. The fluorimetry system of claim 1 wherein the substrate comprises monocrystalline silicon.

6. The fluorimetry system of claim 1 wherein the substrate comprises silicon dioxide.

7. The fluorimetry system of claim 1 wherein the substrate consists of silicon dioxide.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
Continuity (5)
Division 14712219 · May 14, 2015
Division 13971169 · Aug 20, 2013
Division 11724654 · Mar 14, 2007
Continuation 11704466 · Feb 7, 2007
Related Publication 20170372943A1 · Dec 28, 2017