Nanosheet transistors on bulk material
View Patent ↗A method of forming a semiconductor device and resulting device. The method may form a first gate on a gate region of a starting substrate. The starting substrate includes alternating sacrificial layers and semiconductor layers above a buffer sacrificial layer located on a bulk substrate. The method may remove the starting substrate located between the gates. Etching the starting substrate creates a trench into the bulk substrate. The method may form an insulating layer on the inside of the trench. The method may form a masking layer over in the trench in the starting substrate covering a portion of the insulating layer, but below a top surface of the buffer layer. The method may remove the unmasked portion of the insulating layer. The method may form a source/drain in the trench. The method may remove the buffer sacrificial layer, and the sacrificial layers in the layered nanosheet.
1. A method of forming a semiconductor device, the method comprising:
forming a first gate on a gate region of a starting substrate, wherein the first gate is a dummy gate, wherein the starting substrate comprises a layered nanosheet above a buffer sacrificial layer, wherein the buffer sacrificial layer is located on a bulk substrate and a thickness of the buffer sacrificial layer is between 50 nm. and 200 nm., wherein the layered nanosheet comprises alternating sacrificial layers and semiconductor layers, wherein a thickness of each of the sacrificial layers is between 4 nm. and 10 nm., wherein a thickness of each of the semiconductor layers is between 4 nm. and 10 nm., and wherein the sacrificial layers and the sacrificial buffer layer each comprise silicon germanium;
anisotropically etching the starting substrate in a source/drain region of the starting substrate, wherein etching the starting substrate creates a trench through the layered nanosheet and the buffer sacrificial layer and into the bulk substrate;
removing a portion of the buffer sacrificial layer and a portion of the sacrificial layers in the gate region;
forming an insulating layer on the inside of the trench by depositing the insulating layer on a vertical surface of the buffer sacrificial layer and a vertical surface of the sacrificial layers, and wherein the vertical surface of the buffer sacrificial layer and the vertical surface of the sacrificial layers are located in the gate region;
forming a masking layer over the trench in the starting substrate, wherein a top surface of the masking layer is below a top surface of the buffer sacrificial layer and covering a portion of the insulating layer;
removing an unmasked portion of the insulating layer, wherein removing the unmasked portion of the insulating layer comprises an anisotropic etch and retaining the portion of the insulating layer located beneath the first gate;
forming a source/drain in the trench;
removing the buffer sacrificial layer and the sacrificial layers in the layered nanosheet;
forming an inter layer dielectric (ILD) above the source/drain and above the first gate, wherein forming the ILD completely fills a region between the source/drain and the insulating layer, wherein ILD is not formed in a region between the source/drain and the insulating layer;
forming source/drain contacts and a gate contact through the ILD;
removing the first gate;
removing the buffer sacrificial layer and the sacrificial layers in the gate region;
forming a gate dielectric in the gate region; and
forming a gate metal in the gate region.