IP Library Granted Patent US 10,935,739
Granted Patent B2
US 10,935,739 · App. 15/714,886 · Granted Mar 2, 2021

Methods and systems for hermetically sealed fiber to chip connections

Inventors: Roy Meade (Boise, ID); Gurtej Sandhu (Boise, ID)
Assignee: Micron Technology, Inc.
G02B6/4251G02B6/12G02B6/25G02B6/255G02B6/262G02B6/305G02B6/424
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,935,739
App. No.
15/714,886
Granted
Mar 2, 2021
Kind
B2
Abstract

Disclosed are methods of providing a hermetically sealed optical connection between an optical fiber and an optical element of a chip and a photonic-integrated chip manufactured using such methods.

Claims (28)

1. An optical device, comprising:

a photonic-integrated chip on which an optical waveguide is formed, the photonic-integrated chip having a flat base surface; and

an optical fiber assembly comprising an optical fiber having a flat terminating end surface that is pre-activated in a plasma to create dangling bonds on the terminating end surface of the optical fiber which facilitate coupling with the optical waveguide;

wherein the terminating end surface of the optical fiber directly contacts the base surface of the photonic-integrated chip, thereby providing a hermetically sealed optical connection to the optical waveguide formed in the photonic-integrated chip, and

wherein the photonic-integrated chip includes a photonic element distinct from the optical waveguide.

2. The optical device of claim 1 , wherein the plasma is a first plasma and the flat base surface is pre-activated in a second plasma.

3. The optical device of claim 2 , wherein the first plasma and the second plasma are a same plasma.

4. The optical device of claim 1 , wherein a portion of the end surface surrounding the terminating end surface of the optical fiber is tapered and the tapered portion of the end surface of the optical fiber aligns with a corresponding tapered surface surrounding the base surface of the photonic-integrated chip.

5. The optical device of claim 4 , wherein the tapered portion of the end surface of the optical fiber is pre-activated in the plasma.

6. The optical device of claim 4 , wherein the plasma is a first plasma, and wherein the corresponding tapered surface of the photonic-integrated chip is pre-activated in a second plasma.

7. The optical device of claim 1 , wherein the terminating end surface of the optical fiber is coupled to the base surface of the chip such that there are no gaps between the optical fiber and the chip.

8. The optical device of claim 1 , wherein the plasma is generated from a gas species containing at least one of: oxygen, hydrogen, nitrogen, ammonia, and argon.

9. The optical device of claim 1 , wherein the optical fiber forms at least one covalent bond directly with the optical waveguide.

10. The optical device of claim 9 , wherein the at least one covalent bond is a silicon-to-silicon covalent bond.

11. An optical device, comprising:

a photonic-integrated chip on which an optical waveguide is formed, the photonic-integrated chip having a flat base surface; and

an optical fiber assembly comprising an optical fiber having a flat terminating end surface that is pre-activated in a plasma to create dangling bonds on the terminating end surface of the optical fiber which facilitate coupling with the optical waveguide;

wherein the terminating end surface of the optical fiber directly contacts the base surface of the photonic-integrated chip, thereby providing a hermetically sealed optical connection to the optical waveguide formed in the photonic-integrated chip, and

wherein the dangling bonds form at least one covalent bond directly with the optical waveguide of the photonic-integrated chip.

12. The optical device of claim 11 , wherein the plasma is a first plasma and the flat base surface is pre-activated in a second plasma.

13. The optical device of claim 12 , wherein the first plasma and the second plasma are a same plasma.

14. The optical device of claim 11 , wherein a portion of the end surface surrounding the terminating end surface of the optical fiber is tapered and the tapered portion of the end surface of the optical fiber aligns with a corresponding tapered surface surrounding the base surface of the photonic-integrated chip.

15. The optical device of claim 14 , wherein the tapered portion of the end surface of the optical fiber is pre-activated in the plasma.

16. The optical device of claim 14 , wherein the plasma is a first plasma, and wherein the corresponding tapered surface of the photonic-integrated chip is pre-activated in a second plasma.

17. The optical device of claim 11 , wherein the terminating end surface of the optical fiber is coupled to the base surface of the chip such that there are no gaps between the optical fiber and the chip.

18. The optical device of claim 11 , wherein the plasma is generated from a gas species containing at least one of: oxygen, hydrogen, nitrogen, ammonia, and argon.

19. The optical device of claim 11 , wherein the at least one covalent bond is a silicon-to-silicon covalent bond.

20. The optical device of claim 11 , wherein the photonic-integrated chip includes a photonic element distinct from the optical waveguide.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 25, 2017
From: MEADE, ROY; SANDHU, GURTEJ
To: MICRON TECHNOLOGY, INC.
Reel/Frame 043685/0790 →
Continuity (3)
Continuation 15091439 · Apr 5, 2016
Division 13543156 · Jul 6, 2012
Related Publication 20180024304A1 · Jan 25, 2018