Uniform back side exposure of through-silicon vias
Systems and methods for uniform back side exposure of through-silicon vias (TSVs) are disclosed. In one embodiment, a semiconductor device comprises a substrate having a front side with circuit elements formed thereon, and a back side opposite the front side. A TSV extends between the front side and the back side of the substrate, and a dummy feature is disposed over the back side of the substrate, the dummy feature laterally spaced apart from the TSV and substantially coplanar with the TSV. In another embodiment, a semiconductor device comprises a substrate having a TSV formed therethrough, with a control material disposed over the back side of the substrate, the TSV substantially coplanar with the control material.
1. A semiconductor device comprising:
a substrate having a front side, a plurality of circuit elements proximate the front side, and a back side opposite the front side;
a through-silicon via (TSV) extending at least between the front side and the back side;
a chemical-mechanical planarization (CMP) control material disposed over the back side, the TSV substantially coplanar with the CMP control material; and
a dielectric material disposed between the CMP control material and the substrate,
wherein the CMP control material is configured to substantially reduce a material removal rate of a chemical-mechanical planarization (CMP) process.
2. The semiconductor device of claim 1 wherein the substrate comprises a memory circuit.
3. The semiconductor device of claim 1 wherein the CMP control material is metallic.
4. The semiconductor device of claim 1 wherein the CMP control material comprises titanium.
5. The semiconductor device of claim 1 wherein the CMP control material has a thickness between about 0.5 and about 5 microns.
6. The semiconductor device of claim 5 wherein the CMP control material has a thickness of between about 2 and about 5 microns.
7. A method of manufacturing a semiconductor device, the method comprising:
forming a through-silicon via (TSV) in a substrate, the TSV including a conductive material extending through the substrate and projecting beyond a back side of the substrate;
forming a dielectric material over the back side and over the conductive material; and
forming a chemical-mechanical planarization (CMP) control material over the dielectric material, wherein forming the CMP control material comprises depositing a metallic material over the back side of the substrate.
8. The method of claim 7 , further comprising planarizing the back side such that the CMP control material is substantially coplanar with the conductive material of the TSV.
9. The method of claim 8 wherein planarizing the back side comprises using a chemical-mechanical planarization (CMP) process.
10. The method of claim 7 wherein the metallic material comprises titanium.
11. The method of claim 7 wherein the CMP control material has a thickness of between about 0.5 and about 5 microns.