Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer
View Patent ↗Semiconductor wafers with an epitaxial layer are produced in a deposition chamber by placing a substrate wafer in the edge region of the rear side of the substrate wafer onto a placement area of a susceptor; loading the deposition chamber with the susceptor and the substrate wafer lying on the susceptor by contacting the susceptor and transporting the susceptor and the substrate wafer lying on the susceptor from a load lock chamber into the deposition chamber; depositing an epitaxial layer on the substrate wafer; and unloading the deposition chamber by contacting the susceptor and transporting the susceptor and a semiconductor wafer with epitaxial layer, the semiconductor wafer having been produced in the course of depositing the epitaxial layer and lying on the susceptor, from the deposition chamber into the load lock chamber.
1. A method for producing a semiconductor wafer with an epitaxial layer in a deposition chamber, comprising
placing an edge region of the rear side of a substrate wafer onto a placement area of a susceptor in a load lock chamber;
loading the deposition chamber with the susceptor and the substrate wafer lying on the susceptor by contacting the susceptor and transporting the susceptor and the substrate wafer lying on the susceptor from the load lock chamber into the deposition chamber;
depositing the epitaxial layer on the substrate wafer to form a coated semiconductor wafer with the epitaxial layer, while loading the load lock chamber with a further substrate wafer to be coated;
unloading the deposition chamber by contacting the susceptor and transporting the susceptor and the semiconductor wafer with the epitaxial layer lying on the susceptor during the transport from the deposition chamber into the load lock chamber; and
separating the susceptor from the semiconductor wafer with the epitaxial layer in the load lock chamber.
2. The method of claim 1 , further comprising unloading the deposition chamber at a point in time at which the temperature of the semiconductor wafer with the epitaxial layer is not less than 650° C.
3. An apparatus for producing an epitaxially coated semiconductor wafer, comprising:
a deposition chamber;
a load lock chamber;
a susceptor having a placement area for placing a substrate semiconductor wafer in an edge region of the rear side of the substrate semiconductor wafer;
in the load lock chamber, lift elements for raising and lowering the susceptor and the substrate semiconductor wafer or the epitaxially coated semiconductor wafer lying on the susceptor, by contacting the susceptor from below, upper holding clamps for placing the substrate semiconductor wafer or the epitaxially coated semiconductor wafer, and lift pins for lifting the substrate semiconductor wafer or epitaxially coated semiconductor wafer from the susceptor, and
a transport tool, adapted to contact the susceptor, for transporting the susceptor and the substrate semiconductor wafer lying on the susceptor from the load lock chamber into the deposition chamber and for transporting the susceptor and the epitaxially coated semiconductor wafer lying on the susceptor from the deposition chamber into the load lock chamber.
4. The apparatus of claim 3 , having an at least two-part susceptor comprising a ring which contains the placement area, and a baseplate which is located in the deposition chamber.