Structures and methods for heat dissipation of semiconductor devices
View Patent ↗A semiconductor structure is disclosed. In one example, the semiconductor structure includes: a device region having at least one semiconductor device; a dummy region in contact with the device region; and at least one thermal conductor embedded in the dummy region.
1. A semiconductor structure, comprising:
at least one device region having a plurality of semiconductor devices;
a dummy region in contact with the at least one device region;
at least one thermal conductor embedded in the dummy region;
a plurality of vertical interconnect accesses (vias) each of which is disposed in the dummy region and thermally couples the at least one thermal conductor to at least one surface of the semiconductor structure,
wherein the plurality of semiconductor devices and the plurality of vias share the following layers in a same order from bottom to top:
a contact layer formed of tungsten,
a plurality of metal layers formed of copper and formed on the contact layer, and
a top layer formed of aluminum and formed on the plurality of metal layers.
2. The semiconductor structure of claim 1 , wherein embedding of the at least one thermal conductor increases an average thermal conductivity of the dummy region.
3. The semiconductor structure of claim 1 , wherein the at least one thermal conductor is formed of a thermally conductive material that thermally couples the plurality of semiconductor devices to the plurality of vias.
4. The semiconductor structure of claim 1 , wherein each of the plurality of vias thermally couples the at least one thermal conductor to at least one of the following on the at least one surface: a thermal bump, a heat sink, and a heat pipe.
5. The semiconductor structure of claim 1 , further comprising a substrate; a bottom surface below the substrate; and a top surface opposite to the bottom surface.
6. The semiconductor structure of claim 1 , wherein the at least one thermal conductor serves as at least one of the plurality of metal layers in the plurality of vias.
7. The semiconductor structure of claim 1 , wherein the top layer is an interconnect layer formed of aluminum and formed on the plurality of metal layers.
8. A method for forming a semiconductor structure, comprising:
providing a semiconductor substrate;
forming a plurality of semiconductor devices in at least one device region on the semiconductor substrate;
forming at least one thermal conductor in a dummy region on the semiconductor substrate, wherein the dummy region is in contact with the at least one device region;
forming a plurality of vias in the dummy region, wherein each of the plurality of vias thermally couples the at least one thermal conductor to at least one surface of the semiconductor structure,
wherein the plurality of semiconductor devices and the plurality of vias share the following layers in a same order from bottom to top:
a contact layer formed of tungsten,
a plurality of metal layers formed of copper and formed on the contact layer, and
a top layer formed of aluminum and formed on the plurality of metal layers.
9. The method of claim 8 , wherein forming the at least one thermal conductor in the dummy region increases an average thermal conductivity of the dummy region.
10. The method of claim 8 , wherein the at least one thermal conductor is formed of a thermally conductive material that thermally couples the plurality of semiconductor devices to the plurality of vias.
11. The method of claim 8 , further comprising forming at least one of the following on the at least one surface: a thermal bump, a heat sink, and a heat pipe.
12. The method of claim 8 , wherein:
the semiconductor structure has a bottom surface below the substrate and a top surface opposite to the bottom surface.
13. A method for forming a semiconductor structure, comprising:
providing a semiconductor substrate;
forming a plurality of semiconductor devices in at least one device region on the semiconductor substrate;
forming a plurality of vias in a dummy region on the semiconductor substrate, wherein the dummy region is in contact with the at least one device region and each of the plurality of vias thermally couples the plurality of semiconductor devices to at least one surface of the semiconductor structure,
wherein the plurality of semiconductor devices and the plurality of vias share the following layers in a same order from bottom to top:
a contact layer formed of tungsten,
a plurality of metal layers formed of copper and formed on the contact layer, and
a top layer formed of aluminum and formed on the plurality of metal layers.
14. The method of claim 13 , wherein the plurality of vias comprises a thermally conductive material that increases an average thermal conductivity of the dummy region.
15. The method of claim 13 , further comprising forming at least one of the following on the at least one surface: a thermal bump, a heat sink, and a heat pipe.
16. The method of claim 13 , wherein the top layer is an interconnect layer formed of aluminum and formed on the plurality of metal layers.