IP Library Granted Patent US 10,894,848
Granted Patent B2
US 10,894,848 · App. 15/790,606 · Granted Jan 19, 2021

Polyarylene resins

Inventors: Charles R. Kinzie (Boston, MA); Daniel Greene (Shrewsbury, MA); Christopher Gilmore (Natick, MA); James F. Cameron (Brookline, MA); Ping Ding (Acton, MA); Qing Min Wang (North Andover, MA); Young-Seok Kim (Shrewsbury, MA)
Assignee: Rohm and Haas Electronic Materials LLC
C08F32/06C08G61/10C08G61/12C08L45/00C07C49/537C08G2261/135C08G2261/1426C08G2261/312C08G2261/46C08G2261/64C08G2261/65C08G2261/76C08L65/02C08L67/03C09D165/02H01L23/5329
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Quick Facts
Patent No.
US 10,894,848
App. No.
15/790,606
Granted
Jan 19, 2021
Kind
B2
Abstract

Certain cyclopentadienone monomers having polar moieties are useful in forming polyarylene resins having improved solubility in certain organic solvents and are useful in forming polyarylene resin layers in electronics applications.

Claims (14)

1. A cyclopentadienone compound of formula (1)

wherein each R 1 is independently chosen from H, C 1-20 -alkyl, optionally substituted C 5-30 -aryl; each R 2 is independently chosen from H, C 1-20 -alkyl, optionally substituted C 5-30 -aryl, and (PG-L) t -Ar 1 —; each PG is —C(═O)OR 5 ; R 5 is H; each Ar 1 is independently optionally substituted C 5-30 -aryl; L is a single chemical bond; and L 1 is chosen from —O—, —C 1-30 -ketoalkyl-, —C 1-30 -ketoalkyl-C 6-30 -aryl, —C 6 H 4 —, —C 10 H 6 —, —C 6 H 4 —C 6 H 4 —, —C 6 H 4 —O—C 6 H 4 —, —C 6 H 4 —O—C 6 H 4 —O—C 6 H 4 —, and groups of formula (1a); a is an integer from 0 to 3; t is an integer from 1 to 4; and w=1; provided that when a=0, L 1 has the formula (1a)

wherein Ar 2 is a C 5-30 -aryl; each R 3 is independently chosen from H, C 1-20 -alkyl, optionally substituted C 5-30 -aryl, and (PG-L) t -Ar 1 —; each of L 2 , L 3 and L 4 is chosen from a single chemical bond, —O—, —C 1-30 -alkyl-, —C 1-30 -ketoalkyl-, —C 1-30 -ketoalkyl-C 6-30 -aryl-, —C 6-30 -aryl-, —C 6-30 -aryl-O—C 6-30 -aryl-, —C 6-30 -aryl-O—C 6-30 -aryl-O—C 6-30 -aryl-, and combinations of the foregoing; t1 is an integer from 1 to 4; b is 0 or 1; and L 2 , L 3 and L 4 may be the same or different.

2. The cyclopentadienone compound of claim 1 wherein each Ar 1 and Ar 2 is independently chosen from pyridyl, phenyl, naphthyl, acenaphthyl, fluorenyl, carbazolyl, anthracenyl, phenanthryl, pyrenyl, coronenyl, tetracenyl, pentacenyl, tetraphenyl, benzotetracenyl, triphenylenyl, perylenyl, tolyl, xylyl, dibenzothiophenyl, thioxanthonyl, indolyl, and acridinyl.

3. A polyarylene resin comprising as polymerized units one or more first cyclopentadienone monomers of claim 1 , and one or more polyalkynyl-substituted second monomers.

4. The polyarylene resin of claim 3 wherein at least one polyalkynyl-substituted second monomer has the formula (2)

wherein each Ar 3 and Ar 4 is independently a C 5-30 aryl moiety; each R 11 is independently chosen from H, optionally substituted C 5-30 -aryl, and (PG-L 5 ) t2 -Ar 5 —; each R 12 is independently chosen from H, optionally substituted C 5-30 aryl, and -L 5 -PG; PG is a polar moiety; each Ar 5 is independently an optionally substituted C 5-30 -aryl; each L 5 is a single chemical bond or a divalent linking group; each Y is independently a single chemical bond or a divalent linking group chosen from —O—, —S—, —S(═O)—, —S(═O) 2 —, —C(═O)—, —(C(R 13 ) 2 ) z —, C 6-30 -aryl, and —(C(R 13 ) 2 ) z1 —(C 6-30 -aryl)-(C(R 13 ) 2 ) z2 —; each R 13 is independently chosen from H, hydroxy, halo, C 1-10 -alkyl, C 1-10 -haloalkyl, and optionally substituted C 6-30 -aryl; t2=1 to 4; b1=1 to 4; each b2=0 to 2; b1+ each b2=2 to 6; c=0 to 4; each c1=3 to 5; d=0 to 2; z=1 to 10; b1+c+d=6; z1=0 to 10; z2=0 to 10; and z1+z2=1 to 10.

5. The polyarylene resin of claim 4 wherein b1=2 or 3 and d=0.

6. The polyarylene resin of claim 4 wherein R 12 is H, or C 6-10-aryl .

7. A polyarylene resin composition comprising the polyarylene resin of claim 3 and one or more organic solvents.

8. A method of manufacturing an electronic device comprising providing a substrate; coating a layer of the polyarylene resin composition of claim 7 on a surface of the substrate; removing any organic solvent; and curing the polyarylene resin to form a dielectric material layer.

9. A method of forming a patterned layer comprising: (a) coating on a substrate a layer of a polyarylene resin composition of claim 7 ; (b) removing organic solvent to form a polyarylene resin layer; (c) coating a layer of a photoresist on the polyarylene resin layer; (d) exposing the photoresist layer to actinic radiation through a mask; (e) developing the exposed photoresist layer to form a resist pattern; and (f) transferring the pattern to the polyarylene resin layer to expose portions of the substrate.

10. The method of claim 9 wherein at least one polyalkynyl-substituted second monomer has the formula (2)

wherein each Ar 3 and Ar 4 is independently a C 5-30 aryl moiety; each R 11 is independently chosen from H, optionally substituted C 5-30 -aryl, and (PG-L 5 ) t2 -Ar 5 —; each R 2 is independently chosen from H, optionally substituted C 5-30 aryl, and -L 5 -PG; PG is a polar moiety; each Ar 5 is independently an optionally substituted C 5-30 -aryl; each L 5 is a single chemical bond or a divalent linking group; each Y is independently a single chemical bond or a divalent linking group chosen from —O—, —S—, —S(═O)—, —S(═O) 2 —, —C(═O)—, —(C(R 13 ) 2 ) z —, C 6-30 -aryl, and —(C(R 13 ) 2 ) z1 —(C 6-30 -aryl)-(C(R 13 ) 2 ) z2 —; each R 13 is independently chosen from H, hydroxy, halo, C 1-10 -alkyl, C 1-10 -haloalkyl, and optionally substituted C 6-30 -aryl; t2=1 to 4; b1=1 to 4; each b2=0 to 2; b1+ each b2=2 to 6; c=0 to 4; each c1=3 to 5; d=0 to 2; z=1 to 10; b1+c+d=6; z1=0 to 10; z2=0 to 10; and z1+z2=1 to 10.

Assignments (3)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
CHANGE OF NAME Recorded Oct 29, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS LLC
To: DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC
Reel/Frame 069272/0383 →
Continuity (2)
Provisional Application 62434070 · Dec 14, 2016
Related Publication 20180162968A1 · Jun 14, 2018