IP Library Granted Patent US 10,340,312
Granted Patent B2
US 10,340,312 · App. 15/797,716 · Granted Jul 2, 2019

Memory element with a reactive metal layer

Inventors: Christophe J. Chevallier (Palo Alto, CA); Steve Kuo-Ren Hsia (San Jose, CA); Wayne Kinney (Emmett, ID); Steven Longcor (Mountain View, CA); Darrell Rinerson (Cupertino, CA); John Sanchez (Palo Alto, CA); Philip F. S. Swab (Santa Rosa, CA); Edmond R. Ward (Monte Sereno, CA)
Assignee: Hefei Reliance Memory Limited
H01L27/2463G11C11/16G11C11/5685G11C13/0002G11C13/004G11C13/0007G11C13/0069G11C13/0097H01L27/24H01L27/2481H01L45/04H01L45/06H01L45/1233H01L45/1253H01L45/146H01L45/147H01L45/1633H01L45/1658G11C2013/009G11C2213/15G11C2213/31G11C2213/32G11C2213/71G11C2213/77G11C2213/79
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,340,312
App. No.
15/797,716
Granted
Jul 2, 2019
Kind
B2
Abstract

A re-writeable non-volatile memory device including a re-writeable non-volatile two-terminal memory element (ME) having tantalum. The ME including a first terminal, a second terminal, a first layer of a conductive metal oxide (CMO), and a second layer in direct contact with the first layer. The second layer and the first layer being operative to store at least one-bit of data as a plurality of resistive states, and the first and second layer are electrically in series with each other and with the first and second terminals.

Claims (29)

1. A re-writeable non-volatile memory device, comprising:

a re-writeable non-volatile two-terminal memory element (ME) comprising:

a first terminal,

a second terminal,

a first layer, and

a second layer of reactive metal in direct contact with the first layer, the second layer and the first layer operative to store at least one-bit of data as a state of the re-writable non-volatile two-terminal ME.

2. The re-writeable non-volatile memory device of claim 1 , wherein the re-writeable non-volatile two-terminal ME comprises tantalum.

3. The re-writeable non-volatile memory device of claim 1 , wherein the re-writeable non-volatile two-terminal ME comprises titanium.

4. The re-writeable non-volatile memory device of claim 1 , wherein first layer comprises a first transition metal.

5. The re-writeable non-volatile memory device of claim 1 , wherein the second layer comprises a first transition metal.

6. The re-writeable non-volatile memory device of claim 1 , wherein first layer comprises a first transition metal, and wherein the second layer comprises a second transition metal being different than the first transition metal.

7. The re-writeable non-volatile memory device of claim 1 , wherein the re-writeable non-volatile two-terminal ME comprises crystalline.

8. The re-writeable non-volatile memory device of claim 1 , wherein the re-writeable non-volatile two-terminal ME comprises a combination of materials including a first transition metal and a material that is different than the first transition metal.

9. The re-writeable non-volatile memory device of claim 1 , wherein the reactive metal of the second layer creates a differential between a first resistive state and a second resistive state in the first layer to exhibit switching properties.

10. The re-writeable non-volatile memory device of claim 1 , wherein the second layer of the reactive metal is deposited on the first layer and is less than 200 Å thick.

11. The re-writeable non-volatile memory device of claim 1 , wherein the reactive metal reacts with the first layer to form a layer of reacted metal in the re-writeable non-volatile two-terminal ME such that the re-writeable non-volatile two-terminal ME is a multi-resistive state ME.

12. The re-writeable non-volatile memory device of claim 11 , wherein the reactive metal creates a non-ohmic device within the multi-resistive state ME.

13. The re-writeable non-volatile memory device of claim 1 , wherein the reactive metal is between 10 Å thick and 100 Å thick.

14. A method of fabricating a re-writeable non-volatile memory device, the method comprising:

forming a first terminal;

forming a second terminal;

forming a first layer; and

forming a second layer of reactive metal in direct contact with the first layer, the second layer and the first layer operative to store at least one-bit of data as a state of a re-writable non-volatile two-terminal memory element.

15. The method of claim 14 , wherein the first layer comprises a transition metal.

16. The method of claim 14 , wherein the second layer comprises a transition metal.

17. The method of claim 14 , wherein the first layer comprises a first transition metal and the second layer comprises a second transition metal that is different than the first transition metal.

18. The method of claim 14 , wherein the re-writeable non-volatile two-terminal ME comprises a combination of materials including a first transition metal and a material that is different than the first transition metal.

19. The method of claim 14 , wherein the forming of the first and second layers are performed through deposition using processing at temperature above 400° C.

20. The method of claim 14 , wherein the forming the second layer comprises depositing the second layer of the reactive metal on the first layer, wherein the second layer of the reactive metal is less than 200 Å thick.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 1, 2018
From: RINERSON, DARRELL; CHEVALLIER, CHRISTOPHE J.; HSIA, STEVE KUO-REN; KINNEY, WAYNE; LONGCOR, STEVEN W.; SANCHEZ, JOHN E., JR.; SWAB, PHIL; WARD, EDMOND R.
To: UNITY SEMICONDUCTOR CORPORATION
Reel/Frame 047024/0820 →
NUNC PRO TUNC ASSIGNMENT Recorded Jun 21, 2018
From: UNITY SEMICONDUCTOR CORPORATION
To: HEFEI RELIANCE MEMORY LIMITED
Reel/Frame 046407/0710 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2018
From: RAMBUS INC.
To: HEFEI RELIANCE MEMORY LIMITED
Reel/Frame 045984/0845 →
Continuity (11)
Continuation 15393545 · Dec 29, 2016
Continuation 14850702 · Sep 10, 2015
Continuation 14167694 · Jan 29, 2014
Continuation 13272985 · Oct 13, 2011
Continuation 12931967 · Feb 15, 2011
Continuation 12653486 · Dec 14, 2009
Continuation 12286723 · Oct 1, 2008
Continuation 12215958 · Jun 30, 2008
Division 11473005 · Jun 22, 2006
Continuation 10773549 · Feb 6, 2004
Related Publication 20180122857A1 · May 3, 2018