Method for bonding thin semiconductor chips to a substrate
View Patent ↗A method for bonding thin chips to a target substrate is described herein. According to an example method, an adhesive tape is provided with thinned chips attached thereto. The chips are transferred to a carrier substrate by one or more tape-to-tape transfer steps. The carrier is then diced into separate carrier-and-chip assemblies, which can be handled by existing tools designed for handling chips of regular thickness. The fact that the thinning step is separate from the carrier attachment may lead to reduced thickness variation of the chips. The use of tape-to-tape transfer steps allows for attaching either the front or the back side of the chips to the carrier. The use of an individual carrier per chip allows for treating the thinned chip as if it were a standard chip.
1. A method for bonding thinned semiconductor chips to a target substrate, the method comprising:
obtaining a first adhesive tape with a plurality of thinned semiconductor chips attached thereto, wherein the thinned semiconductor chips have a given position relative to each other;
transferring the thinned semiconductor chips to a second adhesive tape by one or more tape-to-tape transfer steps, wherein the given position relative to each other is maintained;
providing a carrier substrate having a temporary adhesive layer on a surface;
while the thinned semiconductor chips remain attached to the second adhesive tape, bonding the thinned semiconductor chips to the carrier substrate by attaching the thinned semiconductor chips to the temporary adhesive layer;
peeling off the second adhesive tape, thereby obtaining an assembly of the carrier substrate and the thinned semiconductor chips attached thereto by the temporary adhesive layer;
dicing the assembly, to thereby obtain a plurality of carrier-and-chip assemblies, each carrier-and-chip assembly comprising a carrier chip and a thin chip removably attached thereto;
bonding the carrier-and-chip assemblies to the target substrate, wherein the thinned semiconductor chips are bonded to a surface of the target substrate; and
removing the carrier chips.
2. The method according to claim 1 , wherein a front side of the thinned semiconductor chips is attached to the first adhesive tape.
3. The method according to claim 1 , wherein a back side of the thinned semiconductor chips is attached to the second adhesive tape, so that a front side of the thinned semiconductor chips is attached to the temporary adhesive layer.
4. The method according to claim 1 , wherein thinned semiconductor chips are separate from each other when they are attached to the first adhesive tape.
5. The method according to claim 1 , wherein the thinned semiconductor chips are part of a uniform thinned substrate when they are attached to the first adhesive tape.
6. The method according to claim 1 , wherein the second adhesive tape is a polyimide film tape.
7. The method according to claim 1 , wherein a thickness of the thinned semiconductor chips is within an inclusive range between 10 to 100 micrometers.
8. The method according to claim 7 , wherein the thickness of the thinned semiconductor chips is lower than 50 micrometers.
9. The method according to claim 7 , wherein the thinned semiconductor chips are suitable for use in Ultra-Thin Chip Packaging (UTCP) technology.
10. The method according to claim 1 , wherein the thinned semiconductor chips are bonded to the target substrate by adhesive bonding, and wherein a thermosetting adhesive is produced on a back side of the thinned semiconductor chips when the thinned semiconductor chips are attached to the carrier substrate, before dicing the assembly of the carrier substrate and the thinned semiconductor chips.
11. The method according to claim 1 , wherein the carrier substrate is a glass substrate.
12. The method according to claim 1 , the method further comprising producing the plurality of thinned semiconductor chips attached to a first adhesive tape, wherein producing the plurality of thinned semiconductor chips attached to the first adhesive tape comprises:
producing a plurality of semiconductor chips on a semiconductor wafer, the semiconductor chips being uniform with the wafer; and
while the semiconductor chips remain uniform with the wafer, attaching a front side of the semiconductor chips to the first adhesive tape, and thinning the wafer from a back side, to thereby reduce a thickness of the semiconductor chips to a predefined thickness.
13. The method according to claim 12 , wherein the semiconductor chips are separated laterally from each other prior to the step of attaching the semiconductor chips to the first adhesive tape, and wherein the step of thinning the wafer from the back side is continued until the semiconductor chips are separated and obtain the predefined thickness.
14. A method for bonding thinned semiconductor chips to a target substrate, the method comprising:
producing a plurality of semiconductor chips on a semiconductor wafer, the semiconductor chips being uniform with the wafer;
while the semiconductor chips remain uniform with the wafer, attaching a front side of the semiconductor chips to a first adhesive tape, and thinning the wafer from a back side to reduce a thickness of the semiconductor chips, so as to obtain a plurality of thinned semiconductor chips that have a given position relative to each other;
transferring the thinned semiconductor chips to a second adhesive tape by one or more tape-to-tape transfer steps, wherein the given position of the thinned semiconductor chips relative to each other is maintained;
providing a carrier substrate having a temporary adhesive layer on a surface;
while the thinned semiconductor chips remain attached to the second adhesive tape, bonding the thinned semiconductor chips to the carrier substrate by attaching the thinned semiconductor chips to the temporary adhesive layer;
peeling off the second adhesive tape, thereby obtaining an assembly of the carrier substrate and the thinned semiconductor chips attached thereto by the temporary adhesive layer;
dicing the assembly, to thereby obtain a plurality of carrier-and-chip assemblies, each carrier-and-chip assembly comprising a carrier chip and a thin chip removably attached thereto;
bonding the carrier-and-chip assemblies to the target substrate, wherein the thinned semiconductor chips are bonded to a surface of the target substrate; and
removing the carrier chips.
15. The method according to claim 14 , wherein the second adhesive tape is a polyimide film tape.
16. The method according to claim 14 , wherein a thickness of the thinned semiconductor chips is within an inclusive range between 10 and 100 micrometers.
17. The method according to claim 16 , wherein the thickness of the thinned semiconductor chips is lower than 50 micrometers.
18. The method according to claim 17 , wherein the thinned semiconductor chips are suitable for use in Ultra-Thin Chip Packaging (UTCP) technology.
19. The method according to claim 14 , wherein the thinned semiconductor chips are bonded to the target substrate by adhesive bonding, and wherein a thermosetting adhesive is produced on the back side of the thinned semiconductor chips when the thinned semiconductor chips are attached to the carrier substrate, before dicing the assembly of the carrier substrate and the thinned semiconductor chips.
20. The method according to claim 14 , wherein the carrier substrate is a glass substrate.