IP Library Granted Patent US 10,790,288
Granted Patent B2
US 10,790,288 · App. 15/809,710 · Granted Sep 29, 2020

Memory arrays comprising ferroelectric capacitors

Inventor: Werner Juengling (Meridian, ID)
Assignee: Micron Technology, Inc.
H01L27/10826H01L27/0886H01L27/11507H01L27/1211H01L29/66795H01L29/785H01L29/7851
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Quick Facts
Patent No.
US 10,790,288
App. No.
15/809,710
Granted
Sep 29, 2020
Kind
B2
Abstract

Some embodiments include a memory array which has rows of fins. Each fin has a first pedestal, a second pedestal and a trough between the first and second pedestals. A first source/drain region is within the first pedestal, a second source/drain region is within the second pedestal, and a channel region is along the trough between the first and second pedestals. Digit lines are electrically coupled with the first source/drain regions. Ferroelectric capacitors are electrically coupled with the second source/drain regions. Wordlines are along the rows of fins and overlap the channel regions. Conductive isolation lines are under the wordlines along the rows of fins.

Claims (36)

1. A memory array, comprising:

rows of fins; each fin having a first pedestal, a second pedestal and a trough between the first pedestal and second pedestal; first source/drain regions being within the first pedestal, second source/drain regions being within the second pedestal, and channel regions being along the troughs between the first pedestal and second pedestal;

only a single composition of material is directly between the first and second pedestals;

digit lines electrically coupled with the first source/drain regions;

ferroelectric capacitors electrically coupled with the second source/drain regions;

wordlines along the rows of fins and overlapping the channel regions; and

conductive shielding adjacent the wordlines along the rows of fins.

2. The memory array of claim 1 wherein each row of fins has a first side and a second side; the wordlines gating each row from both of the first and second sides.

3. The memory array of claim 2 wherein each of the wordlines comprise a pair of wordline components, with one component of said pair extending along the first side of a row of fins and the other component of said pair extending along the second side of the row of fins; and wherein the wordline components comprise metal.

4. The memory array of claim 1 wherein the wordlines and the conductive shielding comprise a same composition as one another.

5. The memory array of claim 1 wherein the wordlines and the conductive shielding comprise different compositions relative to one another.

6. The memory array of claim 5 wherein the wordlines comprise metal and the conductive shielding corresponds to lines consisting of conductively-doped silicon.

7. The memory array of claim 1 wherein the fins have bases along n-type doped semiconductor material, and comprising damage regions formed along an upper surface of the n-type doped semiconductor material between bases of adjacent fins along the rows of fins.

8. The memory array of claim 7 wherein the n-type doped semiconductor material is above and directly against p-type doped semiconductor material.

9. The memory array of claim 1 wherein one of the first and second source/drain regions comprises dopant in one of the first and second pedestals that extends elevationally below dopant in the other one of the first and second pedestals.

10. The memory array of claim 1 wherein one of the first and second source/drain regions comprises dopant in one of the first and second pedestals that overlaps with the wordlines; and dopant level in the other one of the first and second pedestals is elevationally above the wordlines.

11. The memory array of claim 1 wherein at least one of the first and second source/drain regions comprises dopant in one of the first and second pedestals that is elevationally below the trough.

12. The memory array of claim 1 wherein the wordlines extend parallel along the rows of fins.

13. The memory array of claim 1 wherein the conductive shielding comprises separate discrete structures, at least two conductive shielding structures between two adjacent wordlines.

14. The memory array of claim 1 wherein the conductive shielding comprises separate discrete structures, at least two conductive shielding structures adjacent a pair of sides of one wordline.

15. An assembly, comprising:

rows of fins; each fin having a first pedestal, a second pedestal and a trough between the first pedestal and second pedestal; first heavily-doped source/drain regions being within the first pedestal, second heavily-doped source/drain regions being within the second pedestal, and channel regions being along the troughs between the first pedestal and second pedestal;

ferroelectric capacitors electrically coupled with the second source/drain regions;

conductive wiring along the rows of fins and overlapping the channel regions; the second heavily-doped source/drain regions vertically overlapping the conductive wiring, and the first heavily-doped source/drain regions not vertically overlapping the conductive wiring; and

conductive isolation lines under the conductive wiring along the rows of fins.

16. The assembly of claim 15 wherein each row of fins has a first side and a second side; and wherein the conductive wiring gates each row from both of the first and second sides.

17. The assembly of claim 15 wherein the second heavily-doped source/drain regions extend vertically across the conductive wiring.

18. The assembly of claim 15 wherein the conductive wiring comprises metal.

19. The assembly of claim 18 wherein the conductive isolation lines comprise silicon.

20. The assembly of claim 18 wherein the conductive isolation lines consist of doped silicon.

21. An assembly, comprising:

rows of fins; each fin having a first pedestal, a second pedestal and a trough between the first pedestal and second pedestal; first source/drain regions being within the first pedestal, second source/drain regions being within the second pedestal, and channel regions being along the troughs between the first pedestal and second pedestal; the fins extending upwardly from an n-type doped semiconductor material; gettering regions being along segments of the n-type doped semiconductor material between the fins;

ferroelectric capacitors electrically coupled with the second source/drain regions; and

conductive wiring along the rows of fins and overlapping the channel regions.

22. The assembly of claim 21 wherein each row of fins has a first side and a second side; and wherein the conductive wiring gates each row from both of the first and second sides.

23. The assembly of claim 21 comprising silicon-containing conductive isolation lines under the conductive wiring along the rows of fins.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050716/0678 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 7 TO PATENT SECURITY AGREEMENT Recorded Feb 6, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 045267/0833 →
Continuity (2)
Continuation 15391699 · Dec 27, 2016
Related Publication 20180182764A1 · Jun 28, 2018
Cited By (1)
US 12,660,194