Vertical light emitting devices with nickel silicide bonding and methods of manufacturing

1. A light emitting device, comprising:

a silicon substrate;

a bonding stack over the silicon substrate and including a first material comprising nickel (Ni), the first material being an outermost layer of the bonding stack;

a nickel silicide (NiSi) material at an interface between the silicon substrate and the first material;

a light emitting structure spaced apart from the silicon substrate such that the bonding stack is between the light emitting structure and the silicon substrate; and

a conductive material between the light emitting structure and the bonding stack, the conductive material containing at least one of indium tin oxide, aluminum zinc oxide, and fluorine-doped tin oxide.

2. The light emitting device of claim 1 wherein the bonding stack further comprises:

a barrier material comprising nickel (Ni); and

a mirror material comprising silver (Ag),

wherein the first material is a bonding material, and wherein the bonding stack consists essentially of the bonding material, the barrier material, and the mirror material.

3. The light emitting device of claim 1 wherein the first material has a thickness from 30-100 Angstroms.

4. The light emitting device of claim 1 wherein—

the bonding stack includes a first bonding portion and a second bonding portion;

the first bonding portion is on a surface of the light emitting structure; and

the second bonding portion is on a sidewall of the light emitting structure.

5. The light emitting device of claim 4 , further comprising a passivation material on the sidewall of the light emitting structure, the passivation material abutting the second bonding portion.

6. The light emitting device of claim 1 wherein the silicon substrate is a uniform material extending continuously over the nickel silicide material.

7. The light emitting device of claim 1 wherein the nickel silicide extends continuously over the silicon substrate.

8. A light emitting device, comprising:

a silicon substrate;

a bonding stack over the silicon substrate and including a first material comprising nickel (Ni), the first material being an outermost layer of the bonding stack;

a nickel silicide (NiSi) material at an interface between the silicon substrate and the first material; and

a light emitting structure spaced apart from the silicon substrate such that the bonding stack is between the light emitting structure and the silicon substrate;

wherein the bonding stack includes a first bonding portion and a second bonding portion;

wherein the first bonding portion is on a surface of the light emitting structure;

wherein the second bonding portion is on a sidewall of the light emitting structure; and

wherein the light emitting structure includes a first semiconductor material, a second semiconductor material, and an active region between the first and second semiconductor materials, and wherein the second bonding portion extends along a portion of the first semiconductor material.

9. A method of manufacturing a light emitting device, the method comprising:

providing a bonding stack over a silicon substrate, wherein the bonding stack (a) includes a first material comprising nickel (Ni), and (b) is an outermost layer of the bonding stack;

bonding the bonding stack to the silicon substrate via forming a nickel silicide (NiSi) material at an interface directly between the silicon substrate and the first material; and

placing a light emitting structure onto the silicon substrate, wherein the light emitting structure is spaced apart from the silicon substrate at least by the bonding stack positioned therebetween.

10. The method of claim 9 wherein the bonding stack further includes a mirror material comprising silver (Ag) proximate the first material and a barrier material comprising nickel proximate the mirror material, and wherein forming the nickel silicide material at the interface directly between the silicon substrate and the first material is done without completely consuming the nickel contained in the first material.

11. A method of manufacturing a light emitting device, the method comprising:

providing a bonding stack over a silicon substrate, wherein the bonding stack (a) includes a first material comprising nickel (Ni), and (b) is an outermost layer of the bonding stack; and

bonding the bonding stack to the silicon substrate via forming a nickel silicide (NiSi) material at an interface directly between the silicon substrate and the first material;

placing a light emitting structure onto the silicon substrate, wherein the light emitting structure is spaced apart from the silicon substrate at least by the bonding stack positioned therebetween; and

wherein bonding the bonding stack to the silicon substrate occurs after placing the light emitting structure onto the silicon substrate.

12. A method of manufacturing a light emitting device, the method comprising:

providing a bonding stack over a silicon substrate, wherein the bonding stack (a) includes a first material comprising nickel (Ni), and (b) is an outermost layer of the bonding stack; and

bonding the bonding stack to the silicon substrate via forming a nickel silicide (NiSi) material at an interface directly between the silicon substrate and the first material;

placing a light emitting structure onto the silicon substrate, wherein the light emitting structure is spaced apart from the silicon substrate at least by the bonding stack positioned therebetween; and

wherein bonding the bonding stack to the silicon substrate further comprises bonding the light emitting structure to the silicon substrate.

13. A method of manufacturing a light emitting device, the method comprising:

providing a bonding stack over a silicon substrate, wherein the bonding stack (a) includes a first material comprising nickel (Ni), and (b) is an outermost layer of the bonding stack;

bonding the bonding stack to the silicon substrate via forming a nickel silicide (NiSi) material at an interface directly between the silicon substrate and the first material; and

placing a light emitting structure onto the silicon substrate, wherein the light emitting structure is spaced apart from the silicon substrate at least by the bonding stack positioned therebetween; and

forming electrodes on the light emitting structure, wherein the electrodes include aluminum (Al), titanium (Ti), and/or an aluminum/titanium alloy.

14. A method of manufacturing a light emitting device, the method comprising:

providing a bonding stack over a silicon substrate, wherein the bonding stack (a) includes a first material comprising nickel (Ni), and (b) is an outermost layer of the bonding stack; and

bonding the bonding stack to the silicon substrate via forming a nickel silicide (NiSi) material at an interface directly between the silicon substrate and the first material;

placing a light emitting structure onto the silicon substrate, wherein the light emitting structure is spaced apart from the silicon substrate at least by the bonding stack positioned therebetween;

wherein bonding the bonding stack to the silicon substrate includes annealing the light emitting structure and the silicon substrate, wherein annealing the light emitting structure and the silicon substrate includes—

heating the light emitting structure and the silicon substrate to a temperature from about 300° C. to about 450° C.; and

maintaining the temperature for a heating period of about 1 to 30 minutes under a bonding pressure of about 50 mPa to about 100 mPa.