Advanced chip to wafer stacking
A method and structure for forming a 3D chip stack using a vacuum chuck. The method may include: forming a first bonding layer on a first wafer and first chips, where the first chips are on a first substrate; forming a second bonding layer on a second wafer and second chips, where the second chips are on a second substrate; separating the second chips from the second wafer, wherein a portion of the second bonding layer remains on the second chips; moving the separated second chips to a cleaning chamber using a vacuum chuck; cleaning the separated second chips in the cleaning chamber; and bonding the second bonding layer on the separated second chips to the first bonding layer on the first chips.
1. A structure for forming a 3D chip stack comprising:
a vacuum chuck having loading bays including a curved top surface for receiving a plurality of separated second chips, wherein a location of each loading bay corresponds with a location of each of a plurality of first chips mounted on a first substrate; and
a movable arm directly attached to the vacuum chuck, wherein the movable arm is capable of moving the vacuum chuck.
2. The structure of claim 1 , further comprising:
a cleaning chamber, wherein the cleaning chamber is capable of cleaning the separated second chips placed in the loading bays of the vacuum chuck.
3. The structure of claim 1 , further comprising:
an activation chamber, wherein the activation chamber is capable of activating a second bonding layer on the separated second chips placed in the loading bays of the vacuum chuck.
4. The structure of claim 1 , wherein the movable arm is capable of moving the vacuum chuck into a cleaning chamber and an activation chamber.
5. The structure of claim 1 , wherein the movable arm is capable of aligning the separated second chips in each loading bay with the first chips on the first substrate.