Method of reducing warpage of semiconductor package substrate and device for reducing warpage
Embodiments disclosed are directed to a method of reducing warpage of a semiconductor package substrate, and a warpage reducing device. The method includes preparing the semiconductor package substrate, heating the prepared semiconductor package substrate, forming at least one bend in the heated semiconductor package substrate, and cooling the semiconductor package substrate having the at least one bend is formed.
1. A warpage reducing device comprising:
a first connection part;
a second connection part provided opposite to the first connection part in a first direction;
a first support member connected to the first connection part and the second connection part and extending in the first direction; and
a first pressing member connected to the first connection part and the second connection part and extending in the first direction,
wherein based on a target being disposed between the first support member and the first pressing member, at least one of the first support member and the first pressing member is configured to move in a second direction perpendicular to the first direction to exert a compressive force on the target thereby forming a plurality of bends in the target.
2. The warpage reducing device of claim 1 , wherein:
the first support member includes a plurality of first bars extending in the first direction,
the first pressing member includes a plurality of second bars extending in the first direction, and
the plurality of first bars and the plurality of second bars are alternately spaced apart from each other in a third direction, the third direction being perpendicular to the first direction and the second direction.
3. The warpage reducing device of claim 2 , wherein a cross-section of each of the plurality of first bars and the plurality of second bars is annular.
4. The warpage reducing device of claim 2 , wherein the plurality of bends have a wave shape.
5. The warpage reducing device of claim 1 , further comprising:
a third connection part and a fourth connection part opposite each other in a third direction, the third direction being perpendicular to the first direction and the second direction;
a second support member connected to the third connection part and the fourth connection part, extending in the third direction and connected to the first support member; and
a second pressing member connected to the third connection part and the fourth connection part, extending in the third direction and connected to the first pressing member,
wherein at least one of the second support member and the second pressing member is configured to move in the second direction to exert the compressive force on the target together with the first support member and the first pressing member.
6. The warpage reducing device of claim 5 , wherein:
the second support member includes a plurality of third bars extending in the third direction,
the second pressing member includes a plurality of fourth bars extending in the third direction, and
the plurality of third bars and the plurality of fourth bars are alternately spaced apart from each other in the first direction.
7. The warpage reducing device of claim 6 , wherein a cross-section of each of the plurality of third bars and the plurality of fourth bars is annular.
8. The warpage reducing device of claim 6 , wherein the plurality of bends have an embossing shape.