IP Library › Granted Patent US 10,381,319
Granted Patent B2
US 10,381,319 · App. 15/832,905 · Granted Aug 13, 2019

Core material, semiconductor package, and forming method of bump electrode

Inventors: Tomoaki Nishino (Tokyo, JP); Shigeki Kondo (Tochigi, JP); Takahiro Hattori (Tochigi, JP); Hiroyoshi Kawasaki (Tokyo, JP); Takahiro Roppongi (Tochigi, JP); Daisuke Soma (Tochigi, JP); Isamu Sato (Saitama, JP)
Assignee: Senju Metal Industry Co., Ltd.
H01L24/13B23K1/0016B23K35/0227B23K35/0244B23K35/26B23K35/262B23K35/264C22C12/00C22C13/02C25D3/60C25D5/10C25D5/12C25D7/00H01L24/11H05K3/34B22F1/0003B22F1/025B22F2999/00B23K2101/40C22C5/00C22C9/00H01L2224/11462H01L2224/11849H01L2224/1312H01L2224/1316H01L2224/1317H01L2224/1318H01L2224/13109H01L2224/13111H01L2224/13113H01L2224/13116H01L2224/13117H01L2224/13118H01L2224/13123H01L2224/13124H01L2224/13138H01L2224/13139H01L2224/13144H01L2224/13147H01L2224/13149H01L2224/13155H01L2224/13157H01L2224/13166H01L2224/13169H01L2224/13171H01L2224/13179H01L2224/13561H01L2224/13582H01L2224/13611H01L2224/13613H01L2224/13655H01L2224/13657H01L2924/014H01L2924/01014H01L2924/01032H01L2924/01057H01L2924/3841
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Quick Facts
Patent No.
US 10,381,319
App. No.
15/832,905
Granted
Aug 13, 2019
Kind
B2
Abstract

A core material including a core and a solder plating layer of a (Sn—Bi)-based solder alloy made of Sn and Bi on a surface of the core. Bi in the solder plating layer is distributed in the solder plating layer at a concentration ratio in a predetermined range of, for example, 91.7% to 106.7%. Bi in the solder plating layer is homogeneous, and thus, a Bi concentration ratio is in a predetermined range over the entire solder plating layer including an inner circumference side and an outer circumference side in the solder plating layer.

Claims (48)

1. A core material, comprising:

a core; and

an electric solder plating layer of an (Sn—Bi)-based solder alloy made of Sn and Bi in an amount of a target content having a value in a range of 3 to 58 mass % on a surface of the core, wherein

the core includes a metal simple substance of Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co, Mn, Au, Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, or Mg, or an alloy of two or more thereof, a metal oxide thereof, or a metal mixed oxide thereof, and

when a concentration ratio of Bi contained in the solder plating layer is set to

Concentration Ratio (%)=(Measured Value of Bi (mass %)/Target Bi Content (mass %))*100, or

Concentration Ratio (%)=(Average Value of Measured Values of Bi (mass %)/Target Bi Content (mass %))*100,

the concentration ratio is in a range of 91.4% to 106.7% across the entire electric solder plating layer.

2. The core material according to claim 1 , wherein the core material further includes a base plating layer of one or more elements selected from the group of Ni and Co, between the surface of the core and the electric solder plating layer in this order.

3. The core material according to claim 2 , wherein a Cu ball or a Cu column is used as the core.

4. The core material according to claim 1 , wherein a Cu ball or a Cu column is used as the core.

5. A semiconductor package in which the core material according to claim 1 is used as a solder bump.

6. A core material, comprising:

a core; and

an electric solder plating layer of an (Sn-58Bi)-based solder alloy made of Sn and Bi in an amount of a target content of 58 mass % on a surface of the core, wherein

the core includes a metal simple substance of Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co, Mn, Au, Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, or Mg, or an alloy of two or more thereof, a metal oxide thereof, or a metal mixed oxide thereof, and

when a concentration ratio of Bi contained in the solder plating layer is set to

Concentration Ratio (%)=(Measured Value of Bi (mass %)/Target Bi Content (mass %))*100, or

Concentration Ratio (%)=(Average Value of Measured Values of Bi (mass %)/Target Bi Content (mass %))*100,

the concentration ratio is in a range of 91.4% to 108.6% across the entire electric solder plating layer.

7. The core material according to claim 6 , wherein the core material further includes a base plating layer of one or more elements selected from the group of Ni and Co, between the surface of the core and the electric solder plating layer in this order.

8. The core material according to claim 7 , wherein a Cu ball or a Cu column is used as the core.

9. The core material according to claim 6 , wherein a Cu ball or a Cu column is used as the core.

10. A semiconductor package in which the core material according to claim 6 is used as a solder bump.

11. A core material, comprising:

a core; and

an electric solder plating layer of an (Sn-40Bi)-based solder alloy made of Sn and Bi in an amount of a target content of 40 mass % on a surface of the core, wherein

the core includes a metal simple substance of Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co, Mn, Au, Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, or Mg, or an alloy of two or more thereof, a metal oxide thereof, or a metal mixed oxide thereof, and

when a concentration ratio of Bi contained in the solder plating layer is set to

Concentration Ratio (%)=(Measured Value of Bi (mass %)/Target Bi Content (mass %))*100, or

Concentration Ratio (%)=(Average Value of Measured Values of Bi (mass %)/Target Bi Content (mass %))*100,

the concentration ratio is in a range of 90% to 107.5% across the entire electric solder plating layer.

12. The core material according to claim 11 , wherein the core material further includes a base plating layer of one or more elements selected from the group of Ni and Co, between the surface of the core and the electric solder plating layer in this order.

13. The core material according to claim 12 , wherein a Cu ball or a Cu column is used as the core.

14. The core material according to claim 11 , wherein a Cu ball or a Cu column is used as the core.

15. A semiconductor package in which the core material according to claim 11 is used as a solder bump.

16. A core material, comprising:

a core; and

an electric solder plating layer of an (Sn-3Bi)-based solder alloy formed of Sn and Bi in an amount of a target content of 3 mass % on a surface of the core, wherein

the core includes a metal simple substance of Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co, Mn, Au, Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, or Mg, or an alloy of two or more thereof, a metal oxide thereof, or a metal mixed oxide thereof, and

when a concentration ratio of Bi contained in the solder plating layer is set to

Concentration Ratio (%)=(Measured Value of Bi (mass %)/Target Bi Content (mass %))*100, or

Concentration Ratio (%)=(Average Value of Measured Values of Bi (mass %)/Target Bi Content (mass %))*100,

the concentration ratio is in a range of 90% to 106.7% across the entire electric solder plating layer.

17. The core material according to claim 16 , wherein the core material further includes a base plating layer of one or more elements selected from the group of Ni and Co, between the surface of the core and the electric solder plating layer in this order.

18. The core material according to claim 17 , wherein a Cu ball or a Cu column is used as the core.

19. The core material according to claim 16 , wherein a Cu ball or a Cu column is used as the core.

20. A semiconductor package in which the core material according to claim 16 is used as a solder bump.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 6, 2017
From: KONDO, SHIGEKI; HATTORI, TAKAHIRO; KAWASAKI, HIROYOSHI; ROPPONGI, TAKAHIRO; SOMA, DAISUKE; SATO, ISAMU
To: SENJU METAL INDUSTRY CO., LTD.
Reel/Frame 044311/0541 →
Priority Claims (1)
JP 2016-237468 · Dec 7, 2016 · national
Continuity (1)
Related Publication 20180174991A1 · Jun 21, 2018
Cited By (1)
US 12,370,632