IP Library Granted Patent US 10,147,763
Granted Patent B2
US 10,147,763 · App. 15/836,978 · Granted Dec 4, 2018

Resistive memory cell structures and methods

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Quick Facts
Patent No.
US 10,147,763
App. No.
15/836,978
Granted
Dec 4, 2018
Kind
B2
Abstract

Resistive memory cell structures and methods are described herein. One or more memory cell structures comprise a first resistive memory cell comprising a first resistance variable material and a second resistive memory cell comprising a second resistance variable material that is different than the first resistance variable material.

Claims (13)

1. A method of forming an array of resistive memory cells, the method comprising:

forming a first number of resistive memory cells in a first region of the array, the first number of cells comprising a first resistance variable material;

forming a second number of resistive memory cells in a second region of the array, the second number of cells comprising a second resistance variable material that is different than the first resistance variable material;

forming a first via in a dielectric formed on the first region and the second region of the array;

forming a first resistance variable material on the first and the second region of the array, the first resistance variable material filling the first via;

forming a first cap material on the first resistance variable material;

removing a portion of the first resistance variable material and a portion of the first cap material from the second region of the array;

forming a second via in the dielectric formed on the second region of the array;

forming a second resistance variable material on the first and second region of the array, the second resistance variable material filling the second via;

forming a second cap material on the second resistance variable material;

removing the second resistance variable material and the second cap material from the first region of the array; and

performing an etch process such that the first resistance variable material is confined to the first via and the second resistance variable material is confined to the second via.

2. The method of claim 1 , wherein the first and second resistance variable materials include different chalcogenide alloys.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050716/0678 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 7 TO PATENT SECURITY AGREEMENT Recorded Feb 6, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 045267/0833 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2017
From: PELLIZZER, FABIO; BEDESCHI, FERDINANDO
To: MICRON TECHNOLOGY, INC.
Reel/Frame 044347/0593 →