Monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS and method for producing the same
A method of forming a monolithic integrated PMUT and CMOS with a coplanar elastic, sealing, and passivation layer in a single step without bonding and the resulting device are provided. Embodiments include providing a CMOS wafer with a metal layer; forming a dielectric over the CMOS; forming a sacrificial structure in a portion of the dielectric; forming a bottom electrode; forming a piezoelectric layer over the CMOS; forming a top electrode over portions of the bottom electrode and piezoelectric layer; forming a via through the top electrode down to the bottom electrode and a second via down to the metal layer through the top electrode; forming a second metal layer over and along sidewalls of the first and second via; removing the sacrificial structure, an open cavity formed; and forming a dielectric layer over a portion of the CMOS, the open cavity sealed and an elastic layer and passivation formed.
1. A device comprising:
a first metal layer over a complimentary metal-oxide-semiconductor (CMOS) wafer;
a first dielectric layer over the CMOS wafer;
a cavity in the first dielectric layer over the first metal layer;
a bottom electrode over the first dielectric layer and the cavity;
a piezoelectric layer over a portion of the cavity and the CMOS wafer, a gap formed over a remaining portion of the cavity;
a top electrode over the piezoelectric layer;
a protection layer over the piezoelectric layer and the top electrode and along sidewalls of the top electrode;
a first via through the piezoelectric layer and a first portion of the top electrode down to a portion of the bottom electrode laterally separated from the cavity;
a second via through the piezoelectric layer, the first dielectric layer, and a second portion of the top electrode proximate to the first portion of the top electrode down to the first metal layer;
a second metal layer over and along sidewalls of the first via and the second via, over the first portion of the top electrode and the second portion of the top electrode, and along sidewalls of the protection layer adjacent to the first via and the second via; and
a second dielectric layer over the CMOS and the cavity, wherein various portions of the second dielectric layer respectively form an elastic layer and a passivation.
2. The device according to claim 1 , further comprising:
a seeding layer over the cavity and the CMOS wafer, the seeding layer formed over the first dielectric layer and the cavity and under the bottom electrode and the piezoelectric layer.
3. The device according to claim 1 , further comprising:
a third via through the piezoelectric layer, the first dielectric layer, and a third portion of the top electrode, down to the first metal layer, the third via on an opposite side of the second via from the first via; and
the second metal layer over and along sidewalls of the third via, over the third portion of the top electrode, and along sidewalls of the protection layer adjacent to the third via;
wherein the second via and third via comprise piezoelectric micromachined ultrasonic transducer (PMUT)-application specific integrated circuit (ASIC) electrode vias.
4. The device according to claim 1 , further comprising:
a metal through silicon via (TSV) through the CMOS wafer, the metal TSV laterally separated from the first metal layer;
a third via through the piezoelectric layer, the first dielectric layer, and a third portion of the top electrode down to the metal TSV, the third via on an opposite side of the second via from the first via;
the second metal layer over and along sidewalls of the third via, over the third portion of the top electrode, and along sidewalls of the protection layer adjacent to the third via;
an under bump metallization (UBM) layer under the metal TSV and the CMOS wafer; and
a coupling layer over the second dielectric layer.
5. The device according to claim 1 , further comprising:
a metal through silicon via (TSV) through the CMOS wafer, the first dielectric layer, the piezoelectric layer, and a third portion of the top electrode, the second dielectric layer, the third portion of the top electrode on an opposite side of the second portion of the top electrode from the first portion of the top electrode;
an under bump metallization (UBM) layer the metal TSV and the CMOS wafer; and
a coupling layer over the second dielectric layer.
6. A device comprising:
a cavity in a first dielectric layer over a silicon (Si) wafer;
a bottom electrode over the first dielectric layer and the cavity;
a piezoelectric layer over the cavity and the Si wafer, a gap formed over a remaining portion of the cavity;
a top electrode over the piezoelectric layer;
a protection layer over the piezoelectric layer and the top electrode and along sidewalls of the top electrode;
a via through the piezoelectric layer and a first portion of the top electrode down to a portion of the bottom electrode laterally separated from the cavity;
a first metal layer over and along sidewalls of the via, over the first portion of the top electrode, and along sidewalls of the protection layer adjacent to the via; and
a second dielectric layer over the Si wafer and the cavity, wherein a first portion and a second portion of the second dielectric layer respectively form an elastic layer and passivation.
7. The device according to claim 6 , further comprising:
a second metal layer over the Si wafer and under the cavity and the first dielectric layer;
a second via through the piezoelectric layer and the first dielectric layer, a second portion of the top electrode proximate to the first portion of the top electrode down to the second metal layer;
a third via through the piezoelectric layer, the first dielectric layer, and a third portion of the top electrode down to the second metal layer, the third via on an opposite side of the second via from the first via; and
the first metal layer over and along sidewalls of the second via and the third via, over the second portion of the top electrode and the third portion of the top electrode,
wherein the first metal layer over the third portion of the top electrode comprises an open pad.
8. The device according to claim 6 , further comprising:
a second metal layer over a second portion of the top electrode and a third portion of the top electrode proximate to the first portion of the top electrode and along sidewalls of the protection layer,
wherein the second metal layer over the third portion of the top electrode comprises an open pad.