Method of making a fusion bonded circuit structure
A method of making a fusion bonded circuit structure. Each major surface of an LCP substrate is provided with a seed layers of a conductive material. Resist layers are deposited on the seed layers. The resist layers are processed to create recesses corresponding to a desired circuitry layers on each side of the LCP substrate. The recesses expose portions of the seed layers of conductive material. The LCP substrate is electroplated to simultaneously create conductive traces defined by the first recesses on both sides of the LCP substrate. The resist layers are removed to reveal the conductive traces. The LCP substrate is etched to remove exposed portions of the seed layers adjacent the conductive traces. LCP layers are fusion bonded to the major surfaces of the LCP substrate to encapsulate the conductive traces in an LCP material. The LCP layers can be laser drilled to expose the conductive traces.
1. A method of making a fusion bonded circuit structure comprising the step of:
providing a first liquid crystal polymer (LCP) substrate with first and second major surfaces having first and second seed layers of a conductive material, respectively;
depositing first and second resist layers on the first and second major surfaces of the first LCP substrate, respectively;
processing the first and second resist layers to create a plurality of first and second recesses corresponding to a desired first and second circuitry layers, the plurality of first and second recesses exposing portions of the first and second seed layers of conductive material, respectively;
simultaneously electroplating the first LCP substrate to create first and second conductive traces defined by the plurality of first and second recesses, respectively, wherein the first and second seed layers of conductive material act as an electrical bus for the electroplating process;
removing, the first and second resist layers to reveal the first, and second conductive traces;
etching to remove exposed portions of the first and second seed layers of conductive material adjacent the first and second conductive traces, respectively, wherein an unetched portions of the first and second seed layers of conductive material remains between the first and second conductive traces and the first LCP substrate; and
fusion bonding first and second LCP layers to the first and second major surface of the first LCP substrate to encapsulate the first and second conductive traces in an LCP material.
2. The method of claim 1 wherein the step of depositing the first and second resist layers comprises the steps of:
depositing the first and second resist layers as a liquid; and
imaging the first and second resist layers to create the plurality of first and second recesses.
3. The method of claim 1 wherein the first and second conductive traces comprise a pitch of about 25 microns.
4. The method of claim 1 wherein the first and second conductive traces comprise a thickness of about 20 microns to about 50 microns.
5. The method of claim 1 wherein the first and, second conductive traces comprise a generally rectangular cross-sectional shape.
6. The method of claim 1 further comprising the step of planarizing the first conductive traces before the step of removing the first resist layer.
7. The method of claim 1 further comprising the steps of:
laser drilling a plurality of first vias through the first LCP layer to the first conductive traces; and
bulk plating the plurality of first vias with a conductive material to form a plurality of conductive pillars of solid metal that substantially fill the vias.
8. The method of claim 7 further comprising, the steps of:
preparing inside surfaces of one or more of the plurality of first vias to receive electro less plating; and
electro-less plating one or more of the plurality of first vias before plating the conductive pillars.
9. The method of claim 7 further comprising the steps of:
attaching a second circuitry layer to the first major surface of the first LCP substrate; and
electrically coupling the conductive pillars to the second circuitry layer.
10. The method of claim 9 further comprising the steps of laser drilling a plurality of second vias through, the second LCP layer to the second circuitry layer.
11. The method of claim 1 further comprising the steps of:
laser drilling a plurality of first vias through the first LCP layer to the first conductive traces; and
barrel plating the plurality of first vias.
12. The method of claim 1 wherein the first and second seed layers of the conductive material is about 3 microns to about 5 microns thick.
13. The method of claim 1 further comprising the step of laser drilling the first LCP layer to expose portions of the first conductive traces.
14. The method of claim 1 further comprising, the step of electroplating the first and second recesses to a top surface of the first and second resist layers.
15. The method of claim 1 further comprising the step of applying electro-less plating to sidewalls of the first and second recesses before the electroplating process.
16. A method of making a fusion bonded circuit structure comprising the step of:
providing a first liquid crystal polymer (LCP) substrate with a first and second major surface having first and second seed layers of a conductive material, respectively;
depositing first and second resist layers on the first and second seed layers of conductive material, respectively;
processing the first and second resist layers to create a plurality of first and second recesses corresponding to a plurality of first and second vias openings, the plurality of first and second vias openings exposing portions of the first and second seed layers of conductive material;
simultaneously electroplating the first LCP substrate to create conductive pillars defined by the first and second vias openings, wherein the first and second seed layers of conductive material act as an electrical bus for the electroplating process;
removing the first and second resist layers to reveal the conductive pillars;
etching to remove exposed portions of the first and second seed layers of conductive material adjacent the conductive pillars, wherein an unetched portions of the first and second seed layers of conductive material remains between the conductive pillars and the first LCP substrate; and
fusion bonding first and second LCP layers to the first and second major surfaces of the first LCP substrate to encapsulate the conductive pillars in an LCP material.
17. The method of claim 16 further comprising the step of laser drilling the first and second LCP layers to expose the conductive pillars.
18. The method of claim 16 wherein the conductive pillars comprise a diameter in the range, of about 25 microns to about 50 microns.
19. A method of making a fusion bonded circuit structure comprising the step of:
providing a first liquid crystal polymer (LCP) substrate with a first and second major surface having first and second seed layers of a conductive material;
depositing first, and second resist layers on the first and second seed layers of conductive material;
processing the first and second resist layers to create a plurality of first and second recesses corresponding to a desired first and second circuitry layers respectively, the first and second recesses exposing portions of the first and second seed layers of conductive material, respectively;
simultaneously electroplating the first LCP substrate to create first and second conductive traces defined by the first and second recesses, respectively, wherein the first and second seed layers of conductive material act as an electrical bus for the electroplating process;
removing the first and second resist layers to reveal the first and second conductive traces;
etching to remove exposed portions, of the first and second seed layers of conductive material adjacent the first and second conductive traces; and
fusion bonding first and second fusion bonding layers to the first and second major surface of the first LCP substrate to encapsulate the first and second conductive traces in a fusion bonding material, wherein the first LCP substrate and the first and second fusion bonding layers have dielectric constants that differ less than about 20%.