Semiconductor devices including silver conductive materials
Methods of forming conductive elements, such as interconnects and electrodes, for semiconductor structures and memory cells. The methods include forming a first conductive material and a second conductive material comprising silver in a portion of at least one opening and performing a polishing process to fill the at least one opening with at least one of the first and second conductive materials. An annealing process may be performed to form a mixture or an alloy of the silver and the first conductive material. The methods enable formation of silver-containing conductive elements having reduced dimensions (e.g., less than about 20 nm). The resulting conductive elements have a desirable resistivity. The methods may be used, for example, to form interconnects for electrically connecting active devices and to form electrodes for memory cells. A semiconductor structure and a memory cell including such a conductive structure are also disclosed.
1. A semiconductor device, comprising:
a conductive structure and an interlayer dielectric material overlying an electrode;
a dielectric material directly overlying the interlayer dielectric material;
at least one memory material comprising at least one of a chalcogenide material or an oxide material in direct contact with the dielectric material, the conductive structure, and the interlayer dielectric material, the at least one memory material in direct contact with sidewalls of the dielectric material and with upper surfaces of the conductive structure and the interlayer dielectric material; and
a conductive material directly overlying the at least one of the chalcogenide material or the oxide material, the conductive material comprising silver and tantalum.
2. The semiconductor device of claim 1 , wherein the conductive material comprising silver and tantalum comprises tantalum overlying the silver.
3. The semiconductor device of claim 1 , further comprising a liner over the conductive material, the liner comprising at least one of platinum, tantalum, aluminum (Al), lead (Sb), copper, iridium, titanium, nickel, cobalt, ruthenium, or rhodium.
4. The semiconductor device of claim 1 , wherein the conductive material comprising silver and tantalum comprises an alloy of silver and at least one of platinum, aluminum, tin, copper, iridium, titanium, nickel, cobalt, ruthenium, and rhodium.
5. A semiconductor device, comprising:
a conductive structure and an interlayer dielectric material overlying an electrode;
a memory material comprising at least one of a chalcogenide material or an oxide material between the interlayer dielectric material and a dielectric material overlying the interlayer dielectric material, the at least one of the chalcogenide material or the oxide material direct contact with lower surfaces of the dielectric material and with upper surfaces of the conductive structure and the interlayer dielectric material; and
a conductive material directly overlying the at least one of the chalcogenide material or the oxide material, the conductive material comprising silver and tantalum.
6. A semiconductor device, comprising:
an interlayer dielectric material laterally adjacent to a conductive structure overlying an electrode;
a dielectric material directly overlying the interlayer dielectric material;
a memory material comprising at least one of a chalcogenide material or an oxide material between the interlayer dielectric material and the dielectric material, the at least one of the chalcogenide material or the oxide material directly overlying the conductive structure and the interlayer dielectric material; and
a conductive material directly overlying the at least one of the chalcogenide material or the oxide material, the conductive material comprising silver and tantalum.
7. The semiconductor device of claim 6 , wherein the at least one of the chalcogenide material or the oxide material directly overlies the conductive structure and directly underlies the dielectric material.
8. A semiconductor device, comprising:
a conductive structure and a dielectric material overlying an electrode;
an interlayer dielectric material laterally adjacent to the conductive structure;
a memory material comprising at least one of a chalcogenide material or an oxide material in contact with the conductive structure; and
a conductive element overlying and in contact with the at least one of the chalcogenide material or the oxide material, the at least one of the chalcogenide material or the oxide material laterally adjacent to the dielectric material and the conductive element, an upper surface of the conductive element being coplanar with an upper surface of the dielectric material, and the conductive element comprising silver, a silver mixture, or a silver alloy.
9. The semiconductor device of claim 8 , wherein the at least one of the chalcogenide material or the oxide material is between the conductive structure and the dielectric material.
10. The semiconductor device of claim 8 , wherein the at least one of the chalcogenide material or the oxide material is between the dielectric material and the conductive element.