Assemblies having vertically-extending structures
View Patent ↗Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
1. An assembly, comprising:
channel material pillars which extend vertically;
memory cells along the channel material pillars;
a conductive structure under the channel material pillars and comprising doped semiconductor material in direct contact with bottom regions of the channel material pillars;
one or more of magnesium, scandium, yttrium and lanthanide elements along the bottom regions of the channel material pillars; and
wherein said one or more of the magnesium, the scandium, the yttrium and the lanthanide elements are within annular structures which extend around the bottom regions of the channel material pillars.
2. The assembly of claim 1 wherein the annular structures comprise the magnesium.
3. The assembly of claim 2 wherein the annular structures comprise the magnesium as magnesium oxide.
4. The assembly of claim 1 wherein the bottom regions of the channel material pillars include terminal ends of the channel material pillars, and include non-terminal segments above the terminal ends; and wherein the annular structures are along the non-terminal segments and not along the terminal ends.
5. The assembly of claim 4 wherein void regions are under the annular structures.
6. The assembly of claim 1 wherein the bottom regions of the channel material pillars include terminal ends of the channel material pillars; and wherein the annular structures are along the terminal ends.
7. An assembly comprising:
a horizontally-extending structure comprising a first semiconductor material;
one or more vertically-extending structures over the horizontally-extending structure and comprising a second semiconductor material; the second semiconductor material of said one or more vertically-extending structures directly contacting the first semiconductor material of the horizontally-extending structure along terminal ends of the one or more vertically-extending structures; said terminal ends of the one or more vertically-extending structures being comprised by bottom regions of the one or more vertically-extending structures;
one or more of magnesium, scandium, yttrium and lanthanide elements along the bottom regions of the one or more vertically-extending structures; and
wherein said one or more of the magnesium, the scandium, the yttrium and the lanthanide elements are within annular structures which extend around the bottom regions of the one or more vertically-extending structures.
8. The assembly of claim 7 wherein the annular structures comprise the magnesium.
9. The assembly of claim 7 wherein the bottom regions of the one or more vertically-extending structures include non-terminal segments above the terminal ends; and wherein the annular structures are along the non-terminal segments and not along the terminal ends.
10. The assembly of claim 9 wherein void regions are under the annular structures.
11. The assembly of claim 7 wherein the annular structures are along the terminal ends.