Package structure and manufacturing method thereof
A package structure includes an insulating encapsulation, at least one first chip, a redistribution layer and a bonding layer. The at least one first chip is encapsulated in the insulating encapsulation. The redistribution layer is located on the insulating encapsulation and the at least one first chip and electrically connected to the at least one first chip. The bonding layer mechanically connects the redistribution layer and the at least one first chip.
1. A package structure, comprising:
an insulating encapsulation;
at least one first chip, encapsulated in the insulating encapsulation;
a redistribution layer, located on the insulating encapsulation and the at least one first chip and electrically connected to the at least one first chip; and
a bonding layer, having two opposite sides physically connected to the redistribution layer and the at least one first chip, respectively.
2. The package structure of claim 1 , further comprising a metal layer comprising a first portion and a second portion physically separated from the first portion, wherein the first portion of the metal layer surrounds the at least one first chip, and the at least one first chip is separated from the insulating encapsulation by the first portion of the metal layer.
3. The package structure of claim 1 , wherein the redistribution layer comprises at least one dielectric layer, and a material of the bonding layer is different from a material of the at least one dielectric layer of the redistribution layer.
4. The package structure of claim 1 , further comprising a second chip disposed on and electrically connected to the redistribution layer, wherein the first redistribution layer is located between the second chip and the at least one first chip.
5. The package structure of claim 1 , wherein the at least one first chip comprises two first chips, and each of the two first chips comprises at least one interconnection structure, wherein the two first chips are electrically communicated to each other through the interconnection structures and the redistribution layer.
6. The package structure of claim 1 , further comprising a package circuit substrate electrically connected to the redistribution layer through a plurality of conductive elements.
7. The package structure of claim 2 , wherein the at least one first chip comprises contact pads and a protection layer partially covering the contact pads, wherein a surface of the protection layer is substantially leveled with and coplanar to a surface of the first portion of the metal layer.
8. The package structure of claim 2 , wherein the second portion of the metal layer partially covers a surface of the bonding layer and penetrates through the bonding layer.
9. The package structure of claim 8 , further comprising a plurality of vias encapsulated in the insulating encapsulation, wherein the plurality of vias penetrate through the insulating encapsulation and the bonding layer, and the plurality of vias are physically separated from the bonding layer by the second portion of the metal layer.
10. A manufacturing method of a package structure, comprising:
providing a carrier;
forming a dielectric adhesive layer having first openings on the carrier;
disposing at least one first chip with a bonding layer having second openings on the dielectric adhesive layer to spatially communicate one of the first openings and a respective one of the second openings;
bonding the at least one first chip on the dielectric adhesive layer by heating and pressing;
forming an insulating encapsulation to encapsulate the at least one first chip;
forming conductive structures in the first openings;
forming a redistribution layer on the insulating encapsulation; and
forming conductive elements on the redistribution layer.
11. The manufacturing method of claim 10 , wherein before forming the insulating encapsulation to encapsulate the at least one first chip, the manufacturing method further comprises forming a metal layer having a first portion and a second portion physically separated from the first portion,
wherein the first portion covers the at least one first chip and separates the at least one first chip from the insulating encapsulation, and the second portion penetrates the dielectric adhesive layer and electrically connected to the redistribution layer.
12. The manufacturing method of claim 10 , further comprising planarizing insulating encapsulation to level a surface of the insulating encapsulation and a rear surface of the at least one first chip so that the surface of the insulating encapsulation and the rear surface of the at least one first chip are substantially coplanar to each other.
13. The manufacturing method of claim 10 , further comprising forming a second chip on the redistribution layer, wherein the second chip is electrically connected to the least one first chip through the redistribution layer.
14. The manufacturing method of claim 10 , wherein after forming the conductive elements on the redistribution layer, the manufacturing method further comprises mounting the conductive elements onto a package circuit substrate.
15. The manufacturing method of claim 11 , further comprising forming a plurality of vias located aside of the at least one first chip, penetrating through the insulating encapsulation and the dielectric adhesive layer, wherein the plurality of vias contact the second portion and are electrically connected to the at least one first chip through the second portion and the redistribution layer.
16. A manufacturing method of a package structure, comprising:
providing a carrier;
disposing at least one first chip provided with a first dielectric adhesive layer and a plurality of conductive structures in the first dielectric adhesive layer on the carrier;
bonding the at least one first chip onto the carrier through the first dielectric adhesive layer by heating and pressing;
forming an insulating encapsulation to encapsulate the at least one first chip;
performing a backside planarizing step to level a surface of the insulating encapsulation and a rear surface of the at least one first chip;
forming a redistribution layer on the first dielectric adhesive layer of the at least one first chip; and
forming conductive elements on the redistribution layer.
17. The manufacturing method of claim 16 , wherein before disposing the at least one first chip provided with the first dielectric adhesive layer on the carrier, the manufacturing method further comprising forming a second dielectric adhesive layer on the carrier.
18. The manufacturing method of claim 16 , further comprising forming a second chip on the redistribution layer, wherein the second chip is electrically connected to the least one first chip through the redistribution layer.
19. The manufacturing method of claim 16 , wherein after forming the conductive elements on the redistribution layer, the manufacturing method further comprises mounting the conductive elements onto a package circuit substrate.
20. The manufacturing method of claim 17 , wherein bonding the at least one first chip onto the carrier comprises bonding the at least one first chip onto the second dielectric adhesive layer formed on the carrier through the first dielectric adhesive layer by heating and pressing.