Semiconductor device having interconnection structure
A semiconductor device includes a semiconductor pattern on a semiconductor substrate, a three-dimensional memory array on the semiconductor pattern, and a peripheral interconnection structure between the semiconductor pattern and the semiconductor substrate. The peripheral interconnection structure includes an upper interconnection structure on a lower interconnection structure. The upper interconnection structure includes an upper interconnection and an upper barrier layer. The lower interconnection structure includes a lower interconnection and a lower barrier layer. The upper barrier layer is under a bottom surface of the upper interconnection and does not cover side surfaces of the upper interconnection. The lower barrier layer is under a bottom surface of the lower interconnection and covers side surfaces of the lower interconnection.
1. A semiconductor device comprising:
a semiconductor substrate;
a semiconductor pattern on the semiconductor substrate;
a three-dimensional memory array on the semiconductor pattern; and
a peripheral interconnection structure between the semiconductor pattern and the semiconductor substrate,
the peripheral interconnection structure including a lower interconnection structure, the lower interconnection structure including a lower interconnection,
wherein side surfaces of the lower interconnection have negative slopes.
2. The semiconductor device of claim 1 , wherein an angle between an upper surface of the lower interconnection and each of the side surfaces of the lower interconnection is an acute angle.
3. The semiconductor device of claim 1 , wherein the peripheral interconnection structure includes an upper interconnection structure over the lower interconnection structure, the upper interconnection structure including an upper interconnection, and
wherein side surfaces of the upper interconnection have positive slopes.
4. The semiconductor device of claim 3 , wherein an angle between an upper surface of the upper interconnection and each of the side surfaces of the upper interconnection is an obtuse angle.
5. The semiconductor device of claim 3 , wherein a thickness of the upper interconnection is greater than a thickness of the lower interconnection.
6. The semiconductor device of claim 3 , wherein the lower interconnection includes a refractory metal having a tensile stress characteristic, and the upper interconnection includes a refractory metal having a different stress characteristic from the lower interconnection.
7. The semiconductor device of claim 3 , wherein the upper interconnection structure further includes an upper barrier layer, and
wherein the upper barrier layer is under a bottom surface of the upper interconnection, and does not cover the side surfaces of the upper interconnection.
8. The semiconductor device of claim 1 , wherein
the lower interconnection structure further includes a lower contact plug under the lower interconnection, and
the lower contact plug is integrally formed with the lower interconnection.
9. The semiconductor device of claim 8 , wherein the lower interconnection structure further includes a lower barrier layer, and
wherein the lower barrier layer is under a bottom surface of the lower interconnection, covers the side surfaces of the lower interconnection, and extends on side surfaces and a bottom surface of the lower contact plug.
10. The semiconductor device of claim 1 , wherein the three-dimensional memory array includes a plurality of cell gates disposed on the semiconductor pattern and spaced apart from each other in a direction perpendicular to an upper surface of the semiconductor pattern, and
wherein each of the plurality of cell gates includes a cell gate conductive pattern including a cell interconnection, and the cell interconnection includes a tungsten material.
11. The semiconductor device of claim 10 , wherein the peripheral interconnection structure includes an upper interconnection structure between the lower interconnection structure and the semiconductor pattern, the upper interconnection structure including an upper interconnection, and
wherein side surfaces of the upper interconnection have positive slopes.
12. The semiconductor device of claim 11 , wherein the cell interconnection includes a refractory metal having a tensile stress characteristic, and the upper interconnection includes a refractory metal having a different stress characteristic from the cell interconnection.
13. The semiconductor device of claim 10 , further comprising:
a metal interconnection over the three-dimensional memory array,
wherein side surfaces of the metal interconnection have positive slopes.
14. The semiconductor device of claim 13 , wherein an angle between an upper surface of the metal interconnection and each of the side surfaces of the metal interconnection is an obtuse angle.
15. The semiconductor device of claim 1 , wherein
the peripheral interconnection structure further includes an upper interconnection structure over the lower interconnection structure,
the upper interconnection structure including an upper interconnection.
16. The semiconductor device of claim 15 , wherein side surfaces of the upper interconnection have positive slopes.
17. The semiconductor device of claim 15 , wherein a thickness of the upper interconnection is greater than a thickness of the lower interconnection.
18. The semiconductor device of claim 15 , wherein the lower interconnection includes a refractory metal having a tensile stress characteristic, and the upper interconnection includes a refractory metal having a different stress characteristic from the lower interconnection.
19. The semiconductor device of claim 15 , wherein the three-dimensional memory array includes a plurality of cell gates disposed on the semiconductor pattern and spaced apart from each other in a direction perpendicular to an upper surface of the semiconductor pattern, and
wherein each of the plurality of cell gates includes a cell gate conductive pattern including a cell interconnection, and the cell interconnection includes a tungsten material.
20. The semiconductor device of claim 19 , further comprising:
a metal interconnection over the three-dimensional memory array,
wherein side surfaces of the metal interconnection have positive slopes.