Methods of forming integrated assemblies
View Patent ↗Some embodiments include an assembly having a CMOS tier. The CMOS tier includes a PMOS deck and an NMOS deck, with the decks being vertically offset relative to one another. The PMOS deck has p-channel transistors which are substantially identical to one another, and the NMOS deck has n-channel transistors which are substantially identical to one another. An insulative region is between the PMOS deck and the NMOS deck. The CMOS tier has one or more circuit components which include one or more of the n-channel transistors coupled with one or more of the p-channel transistors through one or more conductive interconnects extending through the insulative region. Some embodiments include methods of forming assemblies to comprise one or more CMOS tiers.
1. A method of forming a CMOS tier, comprising:
forming a first deck to comprise a plurality of first transistors which are substantially identical to one another; each of the first transistors comprising a vertically-extending semiconductor pillar which includes a channel region between an upper source/drain region and a lower source/drain region, which includes gate dielectric material laterally along the channel region, and which includes gate material along the gate dielectric material and laterally offset from the channel region by the gate dielectric material;
forming an insulative region over the first deck;
patterning an opening to extend through the insulative region to a location of one of the vertically-extending semiconductor pillars of the first transistors;
forming conductive material within the opening to form a conductive interconnect;
forming a second deck over the insulative region, the second deck comprising a plurality of second transistors which are substantially identical to one another; one of the second transistors having a source/drain region coupled with the conductive interconnect;
wherein the first deck comprises a first transistor type, and the second deck comprises a second transistor type; one of the first and second transistor types being a p-channel type, and the other of the first and second transistor types being an n-channel type; and
wherein the conductive material is a second conductive material and the conductive interconnect is a second conductive interconnect; and further comprising removing said one of the vertically-extending semiconductor pillars and forming a first conductive material to replace said one of the vertically-extending semiconductor pillars prior to forming the second conductive material within the opening; the first conductive material being within the location of said one of the vertically-extending pillars and forming a first conductive interconnect extending through the first deck; the second conductive interconnect directly contacting the first conductive interconnect.
2. The method of claim 1 wherein the first and second conductive materials are a same composition as one another.
3. The method of claim 1 , wherein the first and second conductive materials are different compositions relative to one another.
4. The method of claim 1 , wherein the removing of said one of the vertically-extending semiconductor pillars forms a void and exposes gate dielectric material along a section of the void; and further comprising:
forming additional dielectric material along the gate dielectric material to narrow the section of the void; and
forming the first conductive material adjacent the additional dielectric material.