Construction of integrated circuitry and a DRAM construction
View Patent ↗A construction of integrated circuitry comprises a structure comprising conductive material having insulative material there-above. The conductive material and the insulative material respectively have opposing sides in a vertical cross-section. A first insulating material is laterally outward of the opposing sides of the conductive material in the vertical cross-section. A second insulating material is laterally outward of the first insulating material in the vertical cross-section. The second insulating material is of different composition from that of the first insulating material. The second insulating material laterally covers a lower portion of the opposing sides of the insulative material in the vertical cross-section. The second insulating material does not laterally cover an upper portion of the opposing sides of the insulative material in the vertical cross-section. A third insulating material is laterally outward of the second insulating material in the vertical cross-section. The third insulating material is of different composition from that of the second insulating material. The third insulating material laterally covers the lower portion and the upper portion of the opposing sides of the insulative material in the vertical cross-section.
1. A construction of integrated circuitry, comprising:
a structure comprising a conductive material having an insulative material there-above, the conductive material and the insulative material respectively having opposing sides in a vertical cross-section;
a first insulating material laterally outward of the opposing sides of the conductive material in the vertical cross-section;
a second insulating material laterally outward of the first insulating material in the vertical cross-section, the second insulating material being solid and of different composition from that of the first insulating material, the second insulating material laterally covering a lower portion of the opposing sides of the insulative material in the vertical cross-section, the second insulating material not laterally covering an upper portion of the opposing sides of the insulative material in the vertical cross-section, the second insulting material having a top surface that is horizontal, the second insulating material having an upper surface adjacent the top surface that is angled from horizontal; and
a third insulating material laterally outward of the second insulating material in the vertical cross-section, the third insulating material being of different composition from that of the second insulating material, the third insulating material laterally covering the lower portion and the upper portion of the opposing sides of the insulative material in the vertical cross-section, the third insulating material having an inner surface directly above the top surface of the second insulating material, said inner surface being angled from horizontal.
2. The construction of claim 1 wherein the first insulating material is laterally outward of the insulative material.
3. The construction of claim 2 wherein the first insulating material laterally covers all of the opposing sides of the insulative material in the vertical cross-section.
4. The construction of claim 1 wherein the first insulating material laterally covers all of the opposing sides of the conductive material in the vertical cross-section.
5. The construction of claim 1 wherein the insulative material and the first insulating material are of the same composition.
6. The construction of claim 1 wherein the second insulating material has a maximum thickness that is greater than that of the first insulating material.
7. The construction of claim 1 wherein the second insulating material has a maximum thickness that is greater than that of the third insulating material.
8. The construction of claim 1 wherein the third insulating material has a maximum thickness that is greater than that of the first insulating material.
9. The construction of claim 1 wherein the second insulating material has a maximum thickness that is greater than that of each of the first insulating material and the third insulating material, the third insulating material having a maximum thickness that is greater than that of the first insulating material.
10. The construction of claim 1 wherein the lower portion of the opposing sides of the insulative material in the vertical cross-section that is laterally covered by the second insulating material and by the third insulating material is the lowest-most portion of the opposing sides of the insulative material in the vertical cross-section.
11. The construction of claim 1 wherein the upper portion of the opposing sides of the insulative material in the vertical cross-section that is not laterally covered by the second insulating material is the uppermost portion of the opposing sides of the insulative material in the vertical cross-section.
12. The construction of claim 1 wherein the first insulating material and the third insulating material are of the same composition.
13. The construction of claim 1 wherein the second insulating material is directly against the first insulating material.
14. The construction of claim 1 wherein the third insulating material is directly against the second insulating material.
15. A construction of integrated circuitry, comprising:
a pair of structures individually comprising a conductive line and an insulative material there-above, the conductive line and the insulative material respectively having opposing sides in a vertical cross-section;
an elevationally-extending-insulator material along the opposing sides of the conductive line and the opposing sides of the insulative material in the vertical cross-section, the elevationally-extending-insulator material comprising:
a first insulating material laterally outward of the opposing sides of the conductive line and the insulative material in the vertical cross-section;
a second insulating material laterally outward of the first insulating material in the vertical cross-section, the second insulating material being solid and of different composition from that of the first insulating material, the second insulating material laterally covering a lowest-most portion of the opposing sides of the insulative material in the vertical cross-section, the second insulating material not laterally covering an uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the second insulating material laterally covering all of the opposing sides of the conductive line in the vertical cross-section, the second insulting material having a top surface that is horizontal, the second insulating material having an upper surface adjacent the top surface that is angled from horizontal; and
a third insulating material laterally outward of the second insulating material in the vertical cross-section, the third insulating material being of different composition from that of the second insulating material, the third insulating material laterally covering the lowest-most portion and the uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the third insulating material laterally covering all of the opposing sides of the conductive line in the vertical cross-section, the third insulating material having an inner surface directly above the top surface of the second insulating material, said inner surface being angled from horizontal; and
an elevationally-extending-conductor material laterally between the pair of structures and along the insulator material in the vertical cross-section.
16. The construction of claim 15 wherein the vertical cross-section is orthogonal to a longitudinal orientation of the conductive lines, and further comprising an elevationally-extending conductive via directly under at least one of the conductive lines of the pair of structures in the vertical cross-section.
17. The construction of claim 16 wherein only one of the conductive lines of the pair of structures has an elevationally-extending conductive via directly there-under in the vertical cross-section.
18. A DRAM construction comprising:
a pair of structures individually comprising a digit line and an insulative material there-above, the digit line and the insulative material respectively having opposing sides in a vertical cross-section;
an elevationally-extending-insulator material along the opposing sides of the digit line and the opposing sides of the insulative material in the vertical cross-section, the elevationally-extending-insulator material comprising:
a first material comprising silicon nitride laterally outward of the opposing sides of the digit line and the insulative material in the vertical cross-section;
a silicon dioxide laterally outward of the first material comprising silicon nitride in the vertical cross-section, the silicon dioxide laterally covering a lowest-most portion of the opposing sides of the insulative material in the vertical cross-section, the silicon dioxide not laterally covering an uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the silicon dioxide laterally covering all of the opposing sides of the digit line in the vertical cross-section, the silicon dioxide having a top surface that is angled from horizontal; and
a second material comprising silicon nitride laterally outward of the silicon dioxide in the vertical cross-section, the second material comprising silicon nitride laterally covering the lowest-most portion and the uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the second material comprising silicon nitride laterally covering all of the opposing sides of the digit line in the vertical cross-section, the second material comprising silicon nitride having an inner surface directly above the top surface of the silicon dioxide, said inner surface being angled from horizontal;
an elevationally-extending conductor storage node via laterally between the pair of structures and along the insulator material in the vertical cross-section; and
a capacitor directly electrically coupled to the elevationally-extending conductor storage node via.
19. A construction of integrated circuitry, comprising:
a structure comprising a conductive material having an insulative material there-above, the conductive material and the insulative material respectively having opposing sides in a vertical cross-section;
a first insulating material laterally outward of the opposing sides of the conductive material and the insulative material in the vertical cross-section, the first insulating material being over a top surface of the insulative material in the vertical cross-section;
a second insulating material laterally outward of the first insulating material in the vertical cross-section, the second insulating material being solid and of different composition from that of the first insulating material, the second insulating material laterally covering a lower portion of the opposing sides of the insulative material in the vertical cross-section, the second insulating material not laterally covering an upper portion of the opposing sides of the insulative material in the vertical cross-section; and
a third insulating material laterally outward of the second insulating material in the vertical cross-section, the third insulating material being of different composition from that of the second insulating material, the third insulating material laterally covering the lower portion and the upper portion of the opposing sides of the insulative material in the vertical cross-section.
20. A construction of integrated circuitry, comprising:
a pair of structures individually comprising a conductive line and an insulative material there-above, the conductive line and the insulative material respectively having opposing sides in a vertical cross-section;
an elevationally-extending-insulator material along the opposing sides of the conductive line and the opposing sides of the insulative material in the vertical cross-section, the elevationally-extending-insulator material comprising:
a first insulating material laterally outward of the opposing sides of the conductive line and the insulative material in the vertical cross-section, the first insulating material being over a top surface of the insulative material in the vertical cross-section;
a second insulating material laterally outward of the first insulating material in the vertical cross-section, the second insulating material being solid and of different composition from that of the first insulating material, the second insulating material laterally covering a lowest-most portion of the opposing sides of the insulative material in the vertical cross-section, the second insulating material not laterally covering an uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the second insulating material laterally covering all of the opposing sides of the conductive line in the vertical cross-section; and
a third insulating material laterally outward of the second insulating material in the vertical cross-section, the third insulating material being of different composition from that of the second insulating material, the third insulating material laterally covering the lowest-most portion and the uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the third insulating material laterally covering all of the opposing sides of the conductive line in the vertical cross-section; and
an elevationally-extending-conductor material laterally between the pair of structures and along the insulator material in the vertical cross-section.
21. A DRAM construction comprising:
a pair of structures individually comprising a digit line and an insulative material there-above, the digit line and the insulative material respectively having opposing sides in a vertical cross-section;
an elevationally-extending-insulator material along the opposing sides of the digit line and the opposing sides of the insulative material in the vertical cross-section, the elevationally-extending-insulator material comprising:
a first material comprising silicon nitride laterally outward of the opposing sides of the digit line and the insulative material in the vertical cross-section;
a silicon dioxide laterally outward of the first material comprising silicon nitride in the vertical cross-section, the silicon dioxide laterally covering a lowest-most portion of the opposing sides of the insulative material in the vertical cross-section, the silicon dioxide not laterally covering an uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the silicon dioxide laterally covering all of the opposing sides of the digit line in the vertical cross-section; and
a second material comprising silicon nitride laterally outward of the silicon dioxide in the vertical cross-section, the second silicon nitride laterally covering all of the lowest-most portion and all of the uppermost portion of the opposing sides of the insulative material in the vertical cross-section, the second silicon nitride laterally covering all of the opposing sides of the digit line in the vertical cross-section;
an elevationally-extending conductor storage node via laterally between the pair of structures and along the insulator material in the vertical cross-section; and
a capacitor directly electrically coupled to the elevationally-extending conductor storage node via.
22. The construction of claim 1 wherein the upper surface is linearly straight.