IP Library Granted Patent US 10,217,753
Granted Patent B2
US 10,217,753 · App. 15/861,286 · Granted Feb 26, 2019

Memory cells

Inventors: Kamal M. Karda (Boise, ID); Qian Tao (Boise, ID); Durai Vishak Nirmal Ramaswamy (Boise, ID); Haitao Liu (Boise, ID); Kirk D. Prall (Boise, ID); Ashonita Chavan (Boise, ID)
Assignee: Micron Technology, Inc.
H01L27/11502H01G4/08H01L27/10852H01L27/11507H01L28/40H01L28/75H01L27/10805
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Quick Facts
Patent No.
US 10,217,753
App. No.
15/861,286
Granted
Feb 26, 2019
Kind
B2
Abstract

A memory cell includes a select device and a capacitor electrically coupled in series with the select device. The capacitor includes two conductive capacitor electrodes having ferroelectric material there-between. The capacitor has an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material. There is a parallel current leakage path from the one capacitor electrode to the other. The parallel current leakage path is circuit-parallel the intrinsic path and of lower total resistance than the intrinsic path. Other aspects are disclosed.

Claims (28)

1. A memory cell, comprising:

a select device;

a capacitor electrically coupled in series with the select device, the capacitor comprising two conductive capacitor electrodes having ferroelectric material there-between, the capacitor comprising an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material; and

a parallel current leakage path from the one capacitor electrode to the other, the parallel current leakage path being circuit-parallel the intrinsic current leakage path and of lower total resistance than the intrinsic current leakage path; the parallel current leakage path comprising one or more of amorphous silicon, germanium, a metal dichalcogenide, silicon-rich silicon nitride, silicon-rich silicon oxide, and intrinsically dielectric material comprising at least one of SiO 2 and Si 3 N 4 doped with one or more of Ti, Ta, Nb, Mo, Sr, Y, Cr, Hf, Zr, and lanthanide series ions.

2. The memory cell of claim 1 wherein the parallel current leakage path predominantly comprises amorphous silicon.

3. The memory cell of claim 1 wherein the parallel current leakage path predominantly comprises germanium.

4. The memory cell of claim 1 wherein the parallel current leakage path predominantly comprises amorphous silicon and germanium.

5. The memory cell of claim 1 wherein the parallel current leakage path comprises a metal dichalcogenide.

6. The memory cell of claim 1 wherein the parallel current leakage path comprises silicon-rich silicon nitride.

7. The memory cell of claim 1 wherein the parallel current leakage path comprises silicon-rich silicon oxide.

8. The memory cell of claim 1 wherein the parallel current leakage path comprises intrinsically dielectric material comprising SiO 2 doped with one or more of Ti, Ta, Nb, Mo, Sr, Y, Cr, Hf, Zr, and lanthanide series ions.

9. The memory cell of claim 1 wherein the parallel current leakage path comprises intrinsically dielectric material comprising Si 3 N 4 doped with one or more of Ti, Ta, Nb, Mo, Sr, Y, Cr, Hf, Zr, and lanthanide series ions.

10. The memory cell of claim 1 wherein the parallel current leakage path is not directly against the ferroelectric material.

11. A memory cell, comprising:

a select device;

a capacitor electrically coupled in series with the select device, the capacitor comprising two conductive capacitor electrodes having ferroelectric material there-between, the capacitor comprising an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material; and

a parallel current leakage path from the one capacitor electrode to the other, the parallel current leakage path being circuit-parallel the intrinsic current leakage path and of lower total resistance than the intrinsic current leakage path, the parallel current leakage path predominantly comprising one or more chalcogenides.

12. The memory cell of claim 11 wherein the parallel current leakage path is not directly against the ferroelectric material.

13. The memory cell of claim 11 wherein the parallel current leakage path predominantly comprises more than one chalcogenide.

14. A memory cell, comprising:

a select device;

a capacitor electrically coupled in series with the select device, the capacitor comprising two conductive capacitor electrodes having ferroelectric material there-between, the capacitor comprising an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material; and

a parallel current leakage path from the one capacitor electrode to the other, the parallel current leakage path being circuit-parallel the intrinsic current leakage path and of lower total resistance than the intrinsic current leakage path, the parallel current leakage path where between the two capacitor electrodes being non-homogenous.

15. The memory cell of claim 14 wherein the parallel current leakage path is not directly against the ferroelectric material.

16. A memory cell, comprising:

a select device;

a capacitor electrically coupled in series with the select device, the capacitor comprising two conductive capacitor electrodes having ferroelectric material there-between, the capacitor comprising an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material; and

a parallel current leakage path from the one capacitor electrode to the other, the parallel current leakage path being circuit-parallel the intrinsic current leakage path and of lower total resistance than the intrinsic current leakage path, the parallel current leakage path being configured so that current there-through when the memory cell is idle is no more than one nanoampere.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050716/0678 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 7 TO PATENT SECURITY AGREEMENT Recorded Feb 6, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 045267/0833 →
Continuity (4)
Continuation 15584371 · May 2, 2017
Continuation 15064988 · Mar 9, 2016
Continuation 14623749 · Feb 17, 2015
Related Publication 20180145084A1 · May 24, 2018