Method for stress reduction in semiconductor package via carrier
Semiconductor devices, semiconductor device assemblies, and methods of making such semiconductor devices and semiconductor device assemblies. Material may be removed from a semiconductor device having a first thickness to obtain a second thickness and a carrier may be attached to the semiconductor device having a third thickness with the third thickness plus the second thickness substantially equaling the first thickness. The carrier has a coefficient of thermal expansion (CTE) that differs from the CTE of the semiconductor device. The addition of the carrier to the semiconductor device may change the overall warpage or CTE of a semiconductor device assembly. The semiconductor device assembly be include a redistribution layer between the semiconductor device and a substrate. A material may encapsulate the carrier and the semiconductor device. The carrier may provide electromagnetic shielding. A coating may be applied to external surface of the semiconductor device assembly to provide electromagnetic shielding.
1. A semiconductor device assembly comprising:
a semiconductor device, the semiconductor device having a second thickness, the semiconductor device initially having a first thickness, wherein material has been removed from the semiconductor device until the semiconductor device has the second thickness;
a substrate, the semiconductor device being connected to the substrate; and
a carrier connected to a top surface of the semiconductor device wherein the semiconductor device is positioned between the substrate and the carrier, the carrier having a third thickness, wherein the second thickness plus the third thickness substantially equals the first thickness.
2. The assembly of claim 1 , further comprising a redistribution layer between the semiconductor device and the substrate.
3. The assembly of claim 2 , the redistribution layer comprising a plurality of traces positioned within a dielectric material.
4. The assembly of claim 3 , further comprising underfill material positioned between the semiconductor device and the redistribution layer.
5. The assembly of claim 4 , further comprising a material that encapsulates the semiconductor device and the carrier.
6. The assembly of claim 5 , further comprising an exterior layer on the encapsulating material and the redistribution layer, the exterior layer providing electromagnetic shielding.
7. The assembly of claim 6 , wherein the exterior layer is absent between the redistribution layer and the substrate.
8. The assembly of claim 7 , wherein the exterior layer comprises a first internal metal layer and a second external metal layer that differs from the first internal metal layer.
9. The assembly of claim 8 , wherein the first internal metal layer comprises titanium or tantalum and the second external metal layer comprises copper.
10. The assembly of claim 1 , wherein the semiconductor device has a first coefficient of thermal expansion (CTE) and the carrier has a second CTE that differs from the first CTE.
11. The assembly of claim 10 , wherein the semiconductor device comprises silicon.
12. The assembly of claim 11 , wherein the carrier comprises one of a metal, a ceramic, a metal coated with a polyimide, a polymer, a die attach film, an epoxy, or a combination thereof.
13. The assembly of claim 1 , wherein the carrier comprises one of a metal, a ceramic, a metal coated with a polyimide, a polymer, a die attach film, an epoxy, or a combination thereof.
14. The assembly of claim 1 , wherein the carrier comprises one of copper coated with a dry film polyimide, benzocyclobutene, or a die attach film.
15. A semiconductor device comprising:
a semiconductor device having a top surface and a bottom surface opposite the top surface, the semiconductor device having a first coefficient of thermal expansion (CTE) and having a second thickness, the semiconductor device initially having a first thickness, wherein material has been removed from the semiconductor device until the semiconductor device has the second thickness; and
a carrier connected to the top surface of the semiconductor device, the carrier having a second CTE that differs from the first CTE and a third thickness; and
wherein the bottom surface of the semiconductor device is configured to be electrically connected to a substrate.
16. The device of claim 15 , wherein the second thickness plus the third thickness substantially equals the first thickness.
17. The device of claim 16 , wherein the semiconductor device comprises silicon and the second CTE differs from a CTE of silicon.
18. The device of claim 17 , wherein the carrier comprises one of a metal, a ceramic, a metal coated with a polyimide, a polymer, a die attach film, an epoxy, or a combination thereof.