IP Library Granted Patent US 10,043,688
Granted Patent B1
US 10,043,688 · App. 15/867,071 · Granted Aug 7, 2018

Method for mount tape die release system for thin die ejection

Inventors: Jeremy E. Minnich (Boise, ID); Brandon P. Wirz (Boise, ID); Bret K. Street (Meridian, ID); James M. Derderian (Boise, ID)
Assignee: MICRON TECHNOLOGY, INC.
H01L21/67132B32B43/006H01L21/6836B32B2457/00H01L2221/68318H01L2221/68381Y10S156/931Y10S156/941Y10T156/1126Y10T156/1142Y10T156/1184Y10T156/1928
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Quick Facts
Patent No.
US 10,043,688
App. No.
15/867,071
Granted
Aug 7, 2018
Kind
B1
Abstract

An apparatus, system, and a method of using the apparatus or system that includes a bladder positioned between tape and an adhesive layer configured to selectively connect the tape to a semiconductor device. The bladder includes one or more chambers that may be selectively expanded to move a portion of the bladder and adhesive layer away from the tape, which may enable the removal of the semiconductor device. The flow of fluid into each of the chambers may selectively expand the chambers. The chambers may have a substantially rounded upper profile or a substantially pointed upper profile. A material within the chambers may be heated to expand the chambers. A plurality of conduits may permit the flow of fluid into the chambers. The conduits may be inserted into the bladder. The chambers may be collapsed after expansion to enable the removal of a semiconductor device from the tape.

Claims (32)

1. An apparatus comprising:

tape;

an adhesive layer configured to selectively connect the tape to a semiconductor device; and

a bladder positioned between the tape and the adhesive layer, the bladder having a plurality of chambers configured to be selectively expanded, wherein the expansion of the plurality of chambers moves portions of the bladder and adhesive layer away from the tape.

2. The apparatus of claim 1 , wherein a flow of a fluid into each of the plurality of chambers selectively expands each of the plurality of chambers.

3. The apparatus of claim 2 , wherein the fluid comprises one of air, nitrogen, or oxygen.

4. The apparatus of claim 1 , wherein the portions of the bladder are thermally bonded to the tape to create the plurality of chambers.

5. The apparatus of claim 1 , wherein the plurality of chambers when expanded have a substantially rounded upper profile.

6. The apparatus of claim 1 , wherein the plurality of chambers when expanded have a substantially pointed upper profile.

7. The apparatus of claim 1 , each chamber of the plurality of chambers containing a material, wherein heat applied to the material selectively expands each of the plurality of chambers.

8. The apparatus of claim 7 , wherein the material comprises polystyrene and a gaseous blowing agent.

9. The assembly of claim 1 , the tape comprising a plurality of holes, wherein the flow of a fluid through the plurality of holes selectively expands each of the plurality of chambers.

10. A system comprising:

tape;

an adhesive layer configured to selectively connect the tape to a semiconductor device; and

a bladder positioned between the tape and the adhesive layer, the bladder having a plurality of chambers configured to be selectively expanded, wherein the expansion of the plurality of chambers moves portions of the bladder and adhesive layer away from the tape; and

a plurality of conduits configured to provide a fluid to expand each of the plurality of chambers.

11. The system of claim 10 , wherein each of the plurality of conduits are configured to be inserted through the tape into respective chambers of the plurality of chambers.

12. The system of claim 11 , wherein the plurality of conduits are configured to create a hole in the tape.

13. The system of claim 12 , the tape further comprising a plurality of structures configured to align each of the plurality of conduits with one chamber of the plurality of chambers.

14. The system of claim 13 , wherein the plurality of structures are on a bottom surface of the tape.

15. A method of removing a semiconductor device from tape comprising:

providing a bladder between tape and an adhesive layer, the adhesive layer selectively attaching the semiconductor device to the tape; and

expanding a chamber within the bladder, wherein the expansion of the chamber moves the semiconductor device away from the tape.

16. The method of claim 15 , further comprising removing the semiconductor device from the tape.

17. The method of claim 15 , wherein expansion of the chamber within the bladder further comprises flowing a fluid into the chamber.

18. The method of claim 17 , further comprising injecting a conduit through the tape and into the chamber and wherein flowing the fluid into the chamber further comprises flowing the fluid through the conduit into the chamber.

19. The method of claim 15 , wherein expanding the chamber within the bladder further comprises heating a material within the chamber to expand the material.

20. The method of claim 15 , further comprising collapsing the chamber after expanding the chamber.

21. The method of claim 20 , further comprising removing the semiconductor device from the tape.

22. The method of claim 20 , further comprising expanding the chamber a second time after collapsing the chamber.

23. The method of claim 22 , further comprising removing the semiconductor device from the tape.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050716/0678 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 7 TO PATENT SECURITY AGREEMENT Recorded Feb 6, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 045267/0833 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2018
From: MINNICH, JEREMY E.; WIRZ, BRANDON P.; STREET, BRET K.; DERDERIAN, JAMES M.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 044586/0512 →