Semiconductor manufacturing method and semiconductor manufacturing apparatus
A semiconductor manufacturing method according to an embodiment includes forming a first film on a semiconductor substrate. The semiconductor manufacturing method includes forming cavities in the first film. The semiconductor manufacturing method includes forming a second film inside the cavities by a CVD method using first gas containing a component of the second film, detecting a first time point at which the second film blocks openings of the cavities in forming the second film, and ending forming of the second film at a second time point at which a predetermined time has elapsed from the first time point.
1. A semiconductor manufacturing method comprising:
forming a first film on a semiconductor substrate, the first film being a stacked film in which silicon oxide films and silicon nitride films are stacked alternately;
forming a recess that penetrates the first film;
selectively removing the silicon nitride films from the first film through the recess to form cavities in the first film;
transferring the semiconductor substrate in a reaction furnace comprising a gas supplier and a gas discharger; and
forming a tungsten-containing film inside the cavity by a CVD method using first gas containing a component of tungsten, while detecting an amount of HF gas as a byproduct at a gas discharge line using infrared spectroscopy, the byproduct being included in a discharge gas from the gas discharger and used to form the tungsten-containing film; wherein
the formation of the tungsten-containing film includes:
detecting a first time point at which the cavities are closed with the tungsten-containing film is detected based on the decrease amount of HF gas; and
ending forming the tungsten-containing film at a second time point at which a predetermined time has elapsed from the first time point.
2. The method of claim 1 , being a manufacturing method of a three-dimensionally stacked semiconductor storage device.
3. The method of claim 2 , wherein the tungsten-containing film is to be word lines of the semiconductor storage device.
4. The method of claim 1 , wherein
the tungsten-containing film is formed from inside of the cavities in respective layers, which are formed based on the stacked film, to a sidewall of the recess, and
the method further comprising:
separating parts of the tungsten-containing film that are formed inside the cavities in respective layers from each other by removing parts of the second film that are formed on a sidewall of the recess after forming the tungsten-containing film.
5. The method of claim 1 , wherein
the amount of HF gas detected after the first time point is approximately one fourth of that detected before the first time point.
6. The method of claim 1 , wherein
a surface area of the first film after the first time point is approximately 5% to 6% of that before the first time point.