Sputtering target for magnetic recording medium, and process for producing same
A sputtering target for a magnetic recording medium, wherein an average grain area of a B-rich phase is 90 μm 2 or less. A process for producing a sputtering target for a magnetic recording medium, wherein an alloy cast ingot is subject to heat treatment, thereafter subject to primary rolling which includes at least one pass of cold rolling, thereafter subject to secondary rolling, and machined to prepare a target. The obtained sputtering target for a magnetic recording medium has few cracks in the B-rich phase and has a high leakage flux density, and by using this target, it is possible to stabilize the discharge during sputtering, suppress arcing which occurs from cracks in the B-rich phase, and suppress the generation of particles.
1. A sputtering target for magnetic recording medium obtained by rolling a Co—Pt—B-based ingot, wherein an average grain area of a B-rich phase is 20.1 μm 2 or more and 90 μm 2 or less, and wherein the sputtering target consists of 1 to 26 at % of Pt, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
2. The sputtering target for a magnetic recording medium according to claim 1 , wherein a number of cracks in the B-rich phase is 2500 cracks/mm 2 or less.
3. The sputtering target for a magnetic recording medium according to claim 1 , wherein the sputtering target has a maximum magnetic permeability (μmax) of 50 or less.
4. A sputtering target for magnetic recording medium obtained by rolling a Co—Cr—Pt—B-based ingot, wherein an average grain area of a B-rich phase is 20.1 μm 2 or more and 90 μm 2 or less, and wherein the sputtering target consists of 1 to 40 at % of Cr, 1 to 26 at % of Pt, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
5. The sputtering target for a magnetic recording medium according to claim 4 , wherein a number of cracks in the B-rich phase is 2500 cracks/mm 2 or less.
6. The sputtering target for a magnetic recording medium according to claim 4 , wherein the sputtering target has a maximum magnetic permeability (μmax) of 50 or less.