IP Library Granted Patent US 10,937,904
Granted Patent B2
US 10,937,904 · App. 15/890,530 · Granted Mar 2, 2021

Programmable charge-storage transistor, an array of elevationally-extending strings of memory cells, and a method of forming an array of elevationally-extending strings of memory cells

Inventors: Haitao Liu (Boise, ID); Kamal M. Karda (Boise, ID); Albert Fayrushin (Boise, ID)
Assignee: Micron Technology, Inc.
H01L29/78391H01L27/1157H01L27/1159H01L27/11556H01L27/11582H01L27/11597H01L29/40111H01L29/40117H01L29/4234H01L29/42324H01L29/512H01L29/513H01L29/516H01L29/6684H01L29/66833H01L29/7923
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Quick Facts
Patent No.
US 10,937,904
App. No.
15/890,530
Granted
Mar 2, 2021
Kind
B2
Abstract

A programmable charge-storage transistor comprises channel material, insulative charge-passage material, charge-storage material, a control gate, and charge-blocking material between the charge-storage material and the control gate. The charge-blocking material comprises a non-ferroelectric insulator material and a ferroelectric insulator material. Arrays of elevationally-extending strings of memory cells of memory cells are disclosed, including methods of forming such. Other embodiments, including method, are disclosed.

Claims (11)

1. A plurality of programmable charge-storage transistors, the transistors individually comprising:

channel material;

insulative charge-passage material;

charge-storage material;

a control gate;

charge-blocking material between the charge-storage material and the control gate, the charge-blocking material comprising:

a non-ferroelectric insulator material; and

a ferroelectric insulator material; and

a pair of source/drain regions having the channel material extending there-between, the pair of source/drain regions and the channel material defining a current flow path that extends from one edge of one of the pair of source/drain regions through the channel material to one edge of the other of the pair of source/drain regions, the ferroelectric insulator material being discontinuous parallel the current flow path in the channel material.

2. The transistors of claim 1 wherein individual of the transistors are horizontal or within 10 ° of horizontal, the control gate of the individual transistors having a pair of edges that are vertical in a vertical cross-section, the discontinuous ferroelectric insulator material of the individual transistors having at least one outermost vertical edge in the vertical cross-section that is not coincident with either of the vertical edges of the control gate in the vertical cross-section.

3. The transistors of claim 2 wherein the discontinuous ferroelectric insulator material of the individual transistors has only one outermost vertical edge in the vertical cross-section that is not coincident with either of the vertical edges of the control gate in the vertical cross-section.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 11, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050713/0001 →
SUPPLEMENT NO. 9 TO PATENT SECURITY AGREEMENT Recorded Aug 9, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 047282/0463 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 7, 2018
From: LIU, HAITAO; KARDA, KAMAL M.; FAYRUSHIN, ALBERT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 044853/0098 →
Continuity (2)
Provisional Application 62610846 · Dec 27, 2017
Related Publication 20190198673A1 · Jun 27, 2019