Info structure with copper pillar having reversed profile
A method includes forming a first polymer layer to cover a metal pad of a wafer, and patterning the first polymer layer to form a first opening. A first sidewall of the first polymer layer exposed to the first opening has a first tilt angle where the first sidewall is in contact with the metal pad. The method further includes forming a metal pillar in the first opening, sawing the wafer to generate a device die, encapsulating the device die in an encapsulating material, performing a planarization to reveal the metal pillar, forming a second polymer layer over the encapsulating material and the device die, and patterning the second polymer layer to form a second opening. The metal pillar is exposed through the second opening. A second sidewall of the second polymer layer exposed to the second opening has a second tilt angle greater than the first tilt angle.
1. A package comprising:
a device die comprising:
a metal pad;
a first polymer layer covering edge portions of the metal pad; and
a metal pillar extending into the first polymer layer to contact a first sidewall of the first polymer layer, wherein the first sidewall of the first polymer layer defines a first tilt angle with respect to an upper surface of the metal pad;
an encapsulating material encapsulating the device die, wherein a top surface of the metal pillar is level with a top surface of the encapsulating material;
a second polymer layer over the encapsulating material and the device die; and
a redistribution line having a portion extending into the second polymer layer to contact a second sidewall of the second polymer layer, wherein the second sidewall has a second tilt angle greater than the first tilt angle.
2. The package of claim 1 , wherein the first tilt angle is in a range between about 15 degrees and about 45 degrees.
3. The package of claim 1 , wherein the first tilt angle is measured at a joint at which the first sidewall joins the upper surface of the metal pad.
4. The package of claim 1 , wherein a lower portion of the first sidewall of the first polymer layer is curved with a radius, and a portion of the metal pillar in the first polymer layer has a thickness, wherein a ratio of the radius to the thickness is greater than about 0.2.
5. The package of claim 1 , wherein the first polymer layer and the second polymer layer are formed of a same polymer material.
6. The package of claim 1 , wherein the first polymer layer and the second polymer layer are formed of different polymer materials.
7. The package of claim 1 , wherein the second polymer layer comprises a bottom surface contacting a top surface of the metal pad and a top surface of the encapsulating material.
8. A package comprising:
a device die comprising:
a metal pad;
a first dielectric layer having a portion overlapping a portion of the metal pad; and
a metal pillar comprising a lower portion extending into the first dielectric layer to contact a top surface of the metal pad, wherein the lower portion of the metal pillar further contacts a sidewall of the first dielectric layer to form an interface, and the interface is curved;
an encapsulating material encapsulating the device die; and
a second dielectric layer over and contacting both the encapsulating material and the device die.
9. The package of claim 8 , wherein the interface joins the metal pad and defines a first tilt angle with respect to the top surface of the metal pad, and the package further comprises:
a redistribution line having a portion extending into the second dielectric layer to contact a second sidewall of the second dielectric layer, wherein the second sidewall has a second tilt angle greater than the first tilt angle.
10. The package of claim 9 , wherein the first tilt angle is smaller than about 45 degrees.
11. The package of claim 9 , wherein the metal pillar further comprises an upper portion over and connected to the lower portion, wherein the device die further comprises a third dielectric layer, with the upper portion of the metal pillar contacting a sidewall of the third dielectric layer to define an additional interface, wherein the additional interface has a third tilt angle greater than the first tilt angle.
12. The package of claim 8 , wherein the interface has a radius, and a portion of the metal pillar in the first dielectric layer has a thickness, and a ratio of the radius to the thickness is greater than about 0.2.
13. The package of claim 8 , wherein the first dielectric layer and the second dielectric layer are formed of a same dielectric material.
14. The package of claim 8 , wherein the first dielectric layer and the second dielectric layer are formed of different dielectric materials.
15. The package of claim 8 , wherein the top surface of the metal pad and a top surface of the first dielectric layer are substantially level with each other.
16. The package of claim 8 , wherein from a bottom end of the interface to a top end of the interface, tilt angles of the interface increase gradually.
17. A package comprising:
a device die comprising:
a metal pad;
a polymer layer having a portion overlapping a portion of the metal pad; and
a conductive feature comprising:
an upper portion over the polymer layer, wherein a bottom surface of the upper portion contacts a horizontal top surface of the polymer layer to form a horizontal interface; and
a lower portion extending into the polymer layer to contact a top surface of the metal pad, wherein the lower portion contacts a sidewall of the polymer layer to form an additional interface, and wherein from a bottom end to a top end of the additional interface, tilt angles of the additional interface increase.
18. The package of claim 17 , wherein the device die further comprises a passivation layer underlying the polymer layer, wherein the passivation layer comprises a bottom surface having a portion contacting the top surface of the metal pad.
19. The package of claim 17 , wherein at a point the additional interface joins the metal pad, the additional interface has a tilt angle with respect to the top surface of the metal pad, and the tilt angle is smaller than about 45 degrees.
20. The package of claim 17 , wherein the top end is a joining point of the horizontal interface and the additional interface.