Apparatuses comprising protective material along surfaces of tungsten-containing structures
View Patent ↗Some embodiments include an apparatus having a structure with a surface which comprises tungsten. The apparatus has titanium-nitride-containing protective material along and directly against the surface. The structure may be a digit line of a memory array. Some embodiments include a method in which an assembly is formed to have a tungsten-containing layer with an exposed tungsten-containing upper surface. Titanium-nitride-containing protective material is formed over and directly against the tungsten-containing upper surface. Additional material is formed over the protective material, and is spaced from the tungsten-containing upper surface by the protective material. The additional material may comprise silicon nitride and/or silicon dioxide.
1. An apparatus comprising:
a series of tungsten-containing lines extending across a supporting base; the tungsten-containing lines being spaced apart from one another;
each of the tungsten-containing lines comprising, along a cross-section, a bottom surface facing the supporting base and being in direct physical contact with a conductive structure, an opposing top surface consisting essentially of tungsten, and a pair of sidewall surfaces consisting essentially of tungsten extending downwardly from the top surface, the conductive structure and the tungsten-containing line being of an identical width; and
protective material along the top surfaces and the sidewall surfaces of the tungsten-containing lines; the protective material comprising titanium nitride; the titanium nitride of the protective material having a surface consisting essentially of titanium nitride directly against the top and sidewall surfaces that consist essentially of tungsten.
2. The apparatus of claim 1 wherein the tungsten-containing lines are digit lines of a memory array.
3. The apparatus of claim 1 comprising silicon nitride directly against the protective material.
4. The apparatus of claim 1 comprising silicon dioxide directly against the protective material.
5. An apparatus comprising:
a structure having a region which comprises tungsten, the region having a base surface facing a substrate and being in direct physical contact with and extending entirely across a width of a conductive structure, an upper surface opposing and elevationally above the base surface and two sidewall surfaces extending between the upper surface and the base surface, the sidewall surfaces consisting essentially of tungsten; and
a protective material in direct contact with each of the two sidewall surfaces, the protective material consisting essentially of titanium nitride.