ICP emission spectrophotometer
An ICP emission spectrophotometer includes an inductively coupled plasma device, a spectroscope, and a computer. The spectroscope includes an incidence window, an incidence side slit, a diffraction grating, an emission window, an emission side slit, and a detector. Measurement conditions including diffraction condition and a measurement result are displayed on a display device. In a case where there are a plurality of diffraction conditions each including a combination of a diffraction grating and a diffraction order for measuring desired diffracted light, comparison information including at least an intensity and a resolution of emitted light in the diffraction condition is displayed on the display device. A measurer selects diffraction conditions in which resolution is higher from among the diffraction conditions, and selects a diffraction condition in which an intensity is obtained from among the selected diffraction conditions.
1. An ICP emission spectrophotometer comprising:
an inductively coupled plasma device configured to atomize or ionize an analysis target element with inductively coupled plasma to produce an atomic emission light;
a spectroscope comprising:
an incidence side slit provided on an incidence window to which the atomic emission light is incident;
a diffraction grating diffracting the incident atomic emission light;
an emission side slit provided on an emission window from which emitted light is emitted, the emitted light being diffracted light of atomic emission light diffracted by the diffraction grating; and
a detector configured to detect the emitted light emitted from the emission side slit; and
a display device configured to display a diffraction condition including a diffraction order for the atomic emission light in the spectroscope,
wherein the diffraction condition is given in a form in which combinations are comparable with each other, each of the combinations including a candidate diffraction grating and at least an intensity and a resolution of the emitted light for a specific diffraction order of the candidate diffraction grating.
2. The ICP emission spectrophotometer according to claim 1 ,
wherein the diffraction grating comprises at least a first diffraction grating having a first grating constant and a second diffraction grating having a second grating constant, the second grating constant being different from the first grating constant, and
wherein the diffraction condition includes:
an intensity and a resolution of the emitted light for a predetermined diffraction order of the first diffraction grating; and
an intensity and a resolution of the emitted light for a predetermined diffraction order of the second diffraction grating.
3. The ICP emission spectrophotometer according to claim 2 ,
wherein the first diffraction grating has one diffraction order, and the second diffraction grating has a plurality of diffraction orders, and
wherein the first grating constant is smaller than the second grating constant.
4. The ICP emission spectrophotometer according to claim 1 ,
wherein the diffraction condition is given in a form of a comparison table in which combinations are listed to be comparable with each other, each of the combinations including each candidate diffraction grating and at least an intensity and a resolution of the emitted light for a specific diffraction order of the each candidate diffraction grating.
5. The ICP emission spectrophotometer according to claim 1 , wherein the diffraction condition further includes at least one of a slit width of the incidence side slit and a slit width of the emission side slit.
6. The ICP emission spectrophotometer according to claim 1 ,
wherein the incidence side slit is selectable from a plurality of incidence side slits with different slit widths, and
wherein the emission side slit being selectable from a plurality of emission side slits with different slit widths.
7. The ICP emission spectrophotometer according to claim 6 ,
wherein the plurality of incidence side slits with different slit widths includes a first incidence side slit having a first incidence-side slit width and a second incidence side slit having a second incidence-side slit width that is larger than the first incidence-side slit width, and
wherein the plurality of emission side slits with different slit widths includes a first emission side slit having a first emission-side slit width and a second emission side slit having a second emission-side slit width that is larger than the first emission-side slit width.
8. The ICP emission spectrophotometer according to claim 1 ,
wherein the incidence side slit is selectable from a plurality of incidence side slits with the same slit direction, and
wherein the emission side slit being selectable from a plurality of emission side slits with the same slit direction.