IP Library Granted Patent US 10,574,912
Granted Patent B2
US 10,574,912 · App. 15/928,450 · Granted Feb 25, 2020

Method and apparatus for an image sensor capable of simultaneous integration of electrons and holes

Inventor: Jaroslav Hynecek (Allen, TX)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H04N5/355H01L27/1463H01L27/1464H01L27/14612H01L27/14634H04N5/363H04N5/378H04N5/379H04N5/3745
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Quick Facts
Patent No.
US 10,574,912
App. No.
15/928,450
Granted
Feb 25, 2020
Kind
B2
Abstract

Various embodiments of the present technology may comprise methods and apparatus for an image sensor capable of simultaneous integration of electrons and holes. According to an exemplary embodiment, the image sensor comprises a backside-illuminated hybrid bonded stacked chip image sensor comprising a pixel circuit array, and each pixel circuit comprising a charge storage capacitor oriented in a vertical direction in a deep trench isolation region. Both the electrons and holes are generated and integrated (collected) in the pixel simultaneously, and the charge storage capacitor is used for storing the signal generated by holes in the high light level illuminated pixels.

Claims (67)

1. A stacked pixel circuit formed on a first chip and a second chip, comprising:

a photodetector configured to generate electron charge and hole charge in response to light;

a charge overflow device connected to the photodetector and configured to divert the hole charge to a capacitor;

a floating body node disposed between the photodetector and the capacitor;

a first readout circuit connected to the photodetector and configured to output an electron charge-generated voltage; wherein the first readout circuit comprises:

a first reset transistor;

a first source follower transistor; and

a first row select transistor;

a floating diffusion node disposed between the photodetector and the first readout circuit; and

a second readout circuit connected to the floating body node and configured to output a hole charge-generated voltage; wherein the second readout circuit comprises:

a second reset transistor;

a second source follower transistor; and

a second row select transistor.

2. The pixel circuit according to claim 1 , wherein the charge overflow device comprises a junction gate field-effect transistor.

3. The pixel circuit according to claim 1 , wherein the charge overflow device comprises a metal-oxide-semiconductor field-effect transistor having a buried channel.

4. The pixel circuit according to claim 1 , wherein:

the first chip comprises:

the photodetector;

the capacitor;

the charge overflow device; and

the first readout circuit; and

the second chip is vertically stacked with the first chip and comprises the second readout circuit.

5. The pixel circuit according to claim 4 , wherein a hybrid bond connects the capacitor and the second readout circuit.

6. The pixel circuit according to claim 1 , further comprising:

a first current source connected to the first readout circuit; and

a second current source connected to the second readout circuit.

7. The pixel circuit according to claim 1 , wherein the charge overflow device diverts charge from the photodetector after the photodetector reaches a predetermined charge storage threshold.

8. A method for operating an image sensor having a pixel circuit configured to simultaneously integrate electrons and holes, comprising:

simultaneously integrating electron charge and hole charge in a photodiode;

transferring the hole charge to a capacitor after the electron charge reaches a predetermined threshold in the photodiode using a charge overflow device;

converting the electron charge to an electron-generated output voltage using a first readout circuit; and

converting the hole charge to a hole-generated output voltage using a second readout circuit.

9. The method for operating an image sensor according to claim 8 , further comprising:

converting the electron-generated output voltage to an equivalent first digital value;

converting the hole-generated output voltage to an equivalent second digital value; and

combining the first and second digital values to form a single high dynamic range digital signal.

10. The method for operating an image sensor according to claim 9 , wherein the image converts the hole charge to the hole-generated output voltage before converting the electron charge to the electron-generated output voltage.

11. A solid-state stacked chip image sensor, comprising:

an array of pixel circuits, each pixel circuit comprising:

a photodiode;

a floating body region;

a capacitor connected to the floating body region and a ground potential;

a charge overflow structure comprising a drain connected to the photodiode and configured to:

divert charge having a first polarity from the photodiode to the drain; and

divert a corresponding charge of opposite polarity to the capacitor after the photodiode has reached a predetermined charge threshold;

a first readout circuit connected to:

a floating diffusion region; and

the photodiode through a charge transferring device;

wherein the first readout circuit is configured to output an electron-generated voltage; and

a second readout circuit connected to the capacitor and configured to output a hole-generated voltage;

wherein each pixel circuit is formed across a first chip stacked vertically with a second chip, wherein:

the first chip comprises:

the photodiode;

the capacitor; and

the first readout circuitry; and

the second chip comprises:

the second readout circuitry;

a first current source connected to the first readout circuitry; and

a second current source connected to the second readout circuitry.

12. The solid-state stacked chip image sensor according to claim 11 , wherein the first chip and the second chip are bonded together with hybrid bonds located at each pixel circuit.

13. The solid-state stacked chip image sensor according to claim 12 , wherein the hybrid bond is substantially vertically aligned with the photodiode.

14. The solid-state stacked chip image sensor according to claim 11 , wherein the charge overflow structure comprises a junction gate field-effect transistor.

15. The solid-state stacked chip image sensor according to claim 11 , wherein the charge overflow structure comprises a metal-oxide-semiconductor field-effect transistor.

16. The solid-state stacked chip image sensor according to claim 11 , wherein the capacitor is located within a deep trench isolation region, and comprises:

a first electrode connected to the floating body region; and

a second electrode connected to a reference potential.

17. The solid-state stacked chip image sensor according to claim 11 , wherein the image sensor is configured as a backside illuminated image sensor.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 047734, FRAME 0068 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064160/0027 →
SECURITY INTEREST Recorded Dec 6, 2018
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 047734/0068 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 22, 2018
From: HYNECEK, JAROSLAV
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 045314/0512 →