Sealed cavity structures with non-planar surface features to induce stress
The present disclosure relates to semiconductor structures and, more particularly, to sealed cavity structures having a non-planar surface features and methods of manufacture. The structure includes a cavity formed in a substrate material. The cavity is covered with epitaxial material that has a non-planar surface topography which imparts a stress component on a transistor.
1. A structure comprising a cavity formed in a substrate material, the cavity being covered with epitaxial material that has a non-planar surface topography, wherein the epitaxial material that has the non-planar surface topography imparts a stress component on a transistor.
2. The structure of claim 1 , wherein the cavity comprises a trench which includes a curvature at its open end.
3. The structure of claim 1 , wherein the epitaxial material is a reflowed SiGe material and upper Si sealing layer.
4. The structure of claim 3 , wherein the transistor is formed on the upper Si sealing layer which imparts the stress component created from the reflowed SiGe material, above the cavity.
5. The structure of claim 1 , wherein the non-planar surface topography is tailored to apply a tensile stress on NFETs in a channel region to improve NFET electron mobility.
6. The structure of claim 1 , wherein the non-planar surface topography is tailored to apply a compressive stress on PFETs in a channel region to improve PFET hole mobility.
7. The structure of claim 1 , wherein the non-planar surface topography creates a compressive stress on PFETs from a source/drain region to a channel region and a tensile stress on NFETs from a source/drain region to a channel region.
8. The structure of claim 1 , wherein the stress component is a vertical stress component.
9. The structure of claim 1 , wherein the cavity is located under a channel for NFETs and under source/drain regions for PFETs and the non-planar surface topography is bow down the surface topography.
10. The structure of claim 1 , wherein the cavity is located under a channel for PFETs and under source/drain regions for NFETs and the non-planar surface topography is bow up the surface topography.
11. The structure of claim 1 , further comprising an NFET laterally alternating with a PFET separated by an isolation region and the non-planar surface topography is an epi seal undulation to optimize the stress component on the NFET and the PFET simultaneously.
12. The structure of claim 1 , further comprising an NFET across from a PFET and separated by an isolation region and the non-planar surface topography to independently optimize the stress component on the NFET and the PFET.
13. The structure of claim 1 , wherein the cavity is a trench with a single opening sealed with the epitaxial material to maximize a stress component.
14. A structure comprising:
a substrate material;
a cavity formed in the substrate which includes a trench having a curved edge portion at its upper end;
a first material within the trench which migrates to the upper end of the trench and which includes a non-planar surface topography; and
a second material which covers the first material, the non-planar surface topography of the first material imparting a stress component into the second material.
15. The structure of claim 14 , wherein the first material is SiGe, the second material is Si material, the SiGe has a Ge concentration of about 5-30%, and after reflow, the SiGe has a top surface either bowed up or bowed down.
16. The structure of claim 14 , further comprising a transistor formed over the non-planar surface topography.
17. The structure of claim 14 , wherein the non-planar surface topography is tailored to apply a tensile stress on NFETs in a channel region to improve NFET electron mobility.
18. The structure of claim 14 , wherein the non-planar surface topography is tailored to apply a compressive stress on PFETs in a channel region to improve PFET hole mobility.
19. The structure of claim 14 , wherein an NFET and a PFET are provided on a wafer separated by an isolation region and the non-planar surface topography optimizes the stress component on both the NFET and the PFET.