Imaging device and electronic device
An imaging device having a three-dimensional integration structure is provided. A first structure including a transistor including silicon in an active layer or an active region and a second structure including an oxide semiconductor in an active layer are fabricated. After that, the first and second structures are bonded to each other so that metal layers included in the first and second structures are bonded to each other; thus, an imaging device having a three-dimensional integration structure is formed.
1. An imaging device comprising:
a first layer comprising a photoelectric conversion element;
a second layer comprising a first transistor comprising an oxide semiconductor in an active layer, a first insulating layer, and a first metal layer; and
a third layer comprising a second transistor comprising silicon in an active layer or an active region, a second insulating layer, and a second metal layer,
wherein the second layer is provided between the first layer and the third layer,
wherein the first metal layer and the second metal layer are formed using a metal element of a same main component,
wherein the first metal layer comprises a region embedded in the first insulating layer and a region bonded to the second metal layer,
wherein the second metal layer comprises a region embedded in the second insulating layer,
wherein the first insulating layer comprises a region bonded to the second insulating layer,
wherein the first transistor and the second transistor are arranged so that top surfaces of gate electrodes thereof face each other,
wherein the photoelectric conversion element is electrically connected to the first transistor, and
wherein the first transistor and the second transistor are electrically connected to the first metal layer and the second metal layer, respectively.
2. The imaging device according to claim 1 ,
wherein the second layer comprises an n-channel third transistor comprising an oxide semiconductor in an active layer and comprises a third metal layer,
wherein the third layer comprises a p-channel fourth transistor comprising silicon in an active layer or an active region, and comprises a fourth metal layer,
wherein the third metal layer and the fourth metal layer are formed using a metal element of a same main component,
wherein the third metal layer comprises a region embedded in the first insulating layer and a region bonded to the fourth metal layer,
wherein the fourth metal layer comprises a region embedded in the second insulating layer,
wherein the n-channel third transistor and the p-channel fourth transistor are arranged so that top surfaces of gate electrodes thereof face each other, and
wherein the n-channel third transistor and the p-channel fourth transistor are electrically connected to the third metal layer and the fourth metal layer, respectively.
3. The imaging device according to claim 1 , wherein the metal element is Cu, Al, W, or Au.
4. The imaging device according to claim 1 , wherein the oxide semiconductor comprises In, Zn, and M (M is Al, Ga, Y, or Sn).
5. A module comprising a lens and the imaging device according to claim 1 .
6. An electronic device comprising a display device and the imaging device according to claim 1 .
7. An imaging device comprising:
a third layer comprising a second transistor comprising silicon in an active layer or an active region, a second insulating layer, and a second metal layer;
a second layer comprising a first transistor comprising an oxide semiconductor in an active layer, a first insulating layer, and a first metal layer, the second layer being over the third layer; and
a first layer comprising a photoelectric conversion element, the first layer being over the second layer,
wherein the first metal layer and the second metal layer are formed using a metal element of a same main component,
wherein the first metal layer is in contact with the second metal layer, wherein the first insulating layer is in contact with the second insulating layer,
wherein the first transistor and the second transistor are arranged so that top surfaces of gate electrodes thereof face each other, and
wherein the photoelectric conversion element is electrically connected to the first transistor.
8. The imaging device according to claim 7 ,
wherein the second layer comprises an n-channel third transistor comprising an oxide semiconductor in an active layer and comprises a third metal layer,
wherein the third layer comprises a p-channel fourth transistor comprising silicon in an active layer or an active region, and comprises a fourth metal layer,
wherein the third metal layer and the fourth metal layer are formed using a metal element of a same main component,
wherein the third metal layer comprises a region embedded in the first insulating layer and a region bonded to the fourth metal layer,
wherein the fourth metal layer comprises a region embedded in the second insulating layer,
wherein the n-channel third transistor and the p-channel fourth transistor are arranged so that top surfaces of gate electrodes thereof face each other, and
wherein the n-channel third transistor and the p-channel fourth transistor are electrically connected to the third metal layer and the fourth metal layer, respectively.
9. The imaging device according to claim 7 , wherein the metal element is Cu, Al, W, or Au.
10. The imaging device according to claim 7 , wherein the oxide semiconductor comprises In, Zn, and M (M is Al, Ga, Y, or Sn).
11. A module comprising a lens and the imaging device according to claim 7 .
12. An electronic device comprising a display device and the imaging device according to claim 7 .