Integrated memory and integrated assemblies
View Patent ↗Some embodiments include an integrated assembly having a capacitor. The capacitor has a storage node configured as an upwardly-opening container shape. The container shape has a first side surface and a second side surface. The first and second side surfaces are along outer edges of the container shape and are in opposing relation to one another. The second side surface has a lower portion vertically overlapped by the first side surface, and has an upper portion which is not vertically overlapped by the first side surface. A middle-level lattice is adjacent to the first side surface and supports the first side surface. A higher-level lattice is adjacent to the second side surface and supports the second side surface. Some embodiments include integrated memory (e.g., DRAM).
1. An integrated assembly, comprising:
a pair of neighboring capacitors; one of the neighboring capacitors being a first capacitor having a first storage node, and the other of the neighboring capacitors being a second capacitor having a second storage node; the first and second storage nodes together having a configuration, along a cross-section, of an outer pair of sidewalls and an inner pair of sidewalls; a first level being defined to extend along lower regions of the first and second storage nodes; a third level being defined to extend along upper regions of the first and second storage nodes; a second level being defined to be between the first and the third levels;
an upper-level lattice along the third level of the first and second storage nodes and on outer peripheries of the outer pair of sidewalls; and
a middle-level lattice along the second level of the first and second storage nodes and between the inner pair of sidewalls.
2. The integrated assembly of claim 1 wherein the inner pair of sidewalls has upper surfaces which are recessed relative to upper surfaces of the outer pair of sidewalls.
3. The integrated assembly of claim 1 wherein the first and second storage nodes comprise conductive material; wherein the middle-level lattice comprises a first insulative material; wherein the upper-level lattice comprises a second insulative material; and wherein the first and second insulative materials are directly against the conductive material of the first and second storage nodes.
4. The integrated assembly of claim 1 wherein the upper-level lattice and the middle-level lattice comprise a same composition as one another.
5. The integrated assembly of claim 1 wherein the upper-level lattice and the middle-level lattice both comprise silicon nitride.
6. Integrated memory, comprising:
a pair of neighboring capacitors; one of the neighboring capacitors being a first capacitor having a first storage, and the other of the neighboring capacitors being a second capacitor having a second storage node; the first and second storage nodes together having a configuration, along a cross-section, of an outer pair of sidewalls and an inner pair of sidewalls; the inner pair of sidewalls having upper surfaces which are recessed relative to upper surfaces of the outer pair of sidewalls; the first and second storage nodes having upper regions along the upper surfaces of the outer pair of sidewalls, having lower regions beneath the upper regions, and having middle regions between the upper regions and the lower regions;
an upper-level lattice along the upper regions of the first and second storage nodes and on outer peripheries of the outer pair of sidewalls;
a middle-level lattice along the middle regions of the first and second storage nodes and between the inner pair of sidewalls;
a first transistor coupled with the first storage node; and
a second transistor coupled with the second storage node.
7. The integrated memory of claim 6 wherein the upper-level lattice and the middle-level lattice comprise a same composition as one another.
8. The integrated memory of claim 6 wherein the upper-level lattice and the middle-level lattice both comprise silicon nitride.
9. The integrated memory of claim 6 further comprising a lower-level lattice along the lower regions of the first and second storage nodes.
10. The integrated memory of claim 9 wherein the lower-level lattice, the upper-level lattice and the middle-level lattice comprise a same composition as one another.
11. The integrated memory of claim 6 wherein the first and second storage nodes comprise conductive material; wherein the middle-level lattice comprises a first insulative material; wherein the upper-level lattice comprises a second insulative material; and wherein the first and second insulative materials are directly against the conductive material of the first and second storage nodes.