Wafer level packaging, optical detection sensor and method of forming same
An optical detection sensor functions as a proximity detection sensor that includes an optical system and a selectively transmissive structure. Electromagnetic radiation such as laser light can be emitted through a transmissive portion of the selectively transmissive structure. A reflected beam can be detected to determine the presence of an object. The sensor is formed by encapsulating the transmissive structure in a first encapsulant body and encapsulating the optical system in a second encapsulant body. The first and second encapsulant bodies are then joined together. In a wafer scale assembling the structure resulting from the joined encapsulant bodies is diced to form optical detection sensors.
1. An optical detection apparatus, comprising:
an optical system having a front surface, comprising:
a first integrated circuit chip having a top surface including a first sensor and a second sensor;
a second integrated circuit chip having a top surface including an emitter configured to emit electromagnetic radiation;
a first opaque encapsulant body which embeds the first and second integrated circuit chips with the top surfaces of the first and second integrated circuit chips exposed; and
a passivation layer over the first opaque encapsulant body, but not over the first sensor, second sensor and emitter, a top surface of the passivation layer defining the front surface of the optical system;
an opaque barrier mounted to the top surface of the first integrated circuit chip between the first sensor and the second sensor;
a selectively transmissive structure having a rear surface, comprising:
a first region of transmissive material;
a second region of transmissive material; and
a second opaque encapsulant body which embeds the first and second regions of transmissive material, a bottom surface of the second opaque encapsulant body being coplanar with a bottom surface of the first region of transmissive material and a bottom surface of the second region of transmissive material and together defining the rear surface of the selectively transmissive structure; and
means for attaching the rear surface of the selectively transmissive structure at the second opaque encapsulant body to the front surface of the optical system at the passivation layer, the selectively transmissive structure attached in a position where the first region of transmissive material is positioned over the emitter and first sensor and where the second region of transmissive material is positioned over the second sensor.
2. The apparatus of claim 1 , wherein the means for attaching comprises an adhesive material.
3. The apparatus of claim 1 , further comprising a metal interconnect structure between the first and second integrated circuit chips and the passivation layer.
4. The apparatus of claim 1 , wherein the first region has an L-shape in cross-section perpendicular to the top surfaces of the first and second integrated circuit chips.
5. The apparatus of claim 1 , wherein the first opaque encapsulant body includes electrical connection vias passing therethrough in a direction perpendicular to the top surfaces of the first and second integrated circuit chips.
6. The apparatus of claim 5 , further comprising a metal interconnect structure between the first and second integrated circuit chips and the passivation layer which forms an electrical connection between the electrical connection vias and the first and second integrated circuit chips.
7. An optical detection apparatus, comprising:
an optical system having a front surface, comprising:
a first integrated circuit chip having a top surface including a first sensor and a second sensor;
a second integrated circuit chip having a top surface including an emitter configured to emit electromagnetic radiation;
a first opaque encapsulant body which embeds the first and second integrated circuit chips with the top surfaces thereof exposed; and
a passivation layer extending over both a portion of at least one of the first and second integrated circuit chips and a portion of the first opaque encapsulant body, said passivation layer defining the front surface of the optical system;
a selectively transmissive structure having a rear surface, comprising:
a first region of transmissive material;
a second region of transmissive material;
a second opaque encapsulant body which embeds the first and second regions of transmissive material, a bottom surface of the second opaque encapsulant body being coplanar with a bottom surface of the first region of transmissive material and a bottom surface of the second region of transmissive material and together defining the rear surface of the selectively transmissive structure; and
an adhesive material for mounting the rear surface of the selectively transmissive structure at the second opaque encapsulant body to the passivation layer at the front surface of the optical system in a position where the first region of transmissive material is positioned over the emitter and first sensor and where the second region of transmissive material is positioned over the second sensor.
8. The apparatus of claim 7 , further comprising an opaque barrier positioned between the first sensor and the second sensor.
9. The apparatus of claim 7 , further comprising a metal interconnect structure between the first and second integrated circuit chips and the passivation layer.
10. The apparatus of claim 7 , wherein the first region has an L-shape in cross-section perpendicular to the top surfaces of the first and second integrated circuit chips.
11. The apparatus of claim 7 , wherein the first opaque encapsulant body includes electrical connection vias passing therethrough in a direction perpendicular to the top surfaces of the first and second integrated circuit chips.
12. The apparatus of claim 11 , further comprising a metal interconnect structure between the first and second integrated circuit chips and the passivation layer which forms an electrical connection between the electrical connection vias and the first and second integrated circuit chips.