Semiconductor memory devices and methods of fabricating the same
A semiconductor memory device includes a first semiconductor chip and a second semiconductor chip. Each semiconductor chip of the first and second semiconductor chips may include a cell array region and a peripheral circuit region. The cell array region may include an electrode structure including electrodes sequentially stacked on a body conductive layer and vertical structures extending through the electrode structure and connected to the body conductive layer. The peripheral circuit region may include a residual substrate on the body conductive layer and on which a peripheral transistor is located. A bottom surface of the body conductive layer of the second semiconductor chip may face a bottom surface of the body conductive layer of the first semiconductor chip.
1. A semiconductor memory device comprising:
a first semiconductor chip and a second semiconductor chip, wherein each of the first and second semiconductor chips comprises a cell array region and a peripheral circuit region,
the cell array region comprises:
an electrode structure including a plurality of electrodes sequentially stacked on a conductive body layer including a polycrystalline layer; and
vertical structures penetrating the electrode structure and being connected to the conductive body layer,
the peripheral circuit region comprises a remaining substrate, which is provided on the conductive body layer and on which a peripheral transistor is provided, and
a bottom surface of the conductive body layer of the second semiconductor chip faces a bottom surface of the conductive body layer of the first semiconductor chip.
2. The device of claim 1 , wherein the conductive body layer of the first semiconductor chip is electrically connected to the conductive body layer of the second semiconductor chip.
3. The device of claim 1 , wherein the bottom surface of the conductive body layer of the first semiconductor chip is in direct contact with the bottom surface of the conductive body layer of the second semiconductor chip.
4. The device of claim 1 , wherein the polycrystalline layer includes a semiconductor material.
5. The device of claim 1 , wherein the remaining substrate comprises a pick-up impurity region, which is electrically connected to the conductive body layer and has the same conductivity type as the conductive body layer.
6. The device of claim 5 , wherein the remaining substrate comprises an opening provided below the pick-up impurity region, and
the conductive body layer comprises a protruding portion extending into the opening.
7. The device of claim 1 , wherein each of the first and second semiconductor chips further comprises a through electrode, which is provided on the peripheral circuit region and penetrates the conductive body layer.
8. The device of claim 7 , wherein the through electrode is provided to penetrate the remaining substrate.
9. The device of claim 7 , wherein the through electrode is electrically disconnected from the conductive body layer, with an isolation insulating layer interposed therebetween.
10. The device of claim 7 , wherein a bottom surface of the through electrode of the first semiconductor chip is in contact with a bottom surface of the through electrode of the second semiconductor chip.
11. The device of claim 7 , wherein the peripheral circuit region comprises a peripheral gate electrode and a peripheral contact, and
the through electrode is connected to the peripheral gate electrode or the peripheral contact.
12. The device of claim 1 , wherein the conductive body layer is thinner than the remaining substrate.
13. A semiconductor memory device comprising:
a first semiconductor chip and a second semiconductor chip, wherein each of the first and second semiconductor chips comprises a cell array region and a peripheral circuit region,
the cell array region comprises:
an electrode structure including a plurality of electrodes sequentially stacked on a conductive body layer; and
vertical structures penetrating the electrode structure and being connected to the conductive body layer,
the peripheral circuit region comprises a remaining substrate, which is provided on the conductive body layer and on which a peripheral transistor is provided, and
a bottom surface of the conductive body layer of the second semiconductor chip faces a bottom surface of the conductive body layer of the first semiconductor chip,
the remaining substrate including a buried insulating layer and a peripheral active layer, and
the buried insulating layer extending to the cell array region.
14. The device of claim 13 , the conductive body layer including a polycrystalline layer.
15. The device of claim 13 , further comprising:
an inter-chip layer provided between the conductive body layer of the first semiconductor chip and the conductive body layer of the second semiconductor chip,
wherein the inter-chip layer is a conductive layer, and
the conductive body layer of the first semiconductor chip is electrically connected to the conductive body layer of the second semiconductor chip through the inter-chip layer.
16. A semiconductor memory device comprising:
a first semiconductor chip and a second semiconductor chip, wherein each of the first and second semiconductor chips comprises a cell array region, a connection region and a peripheral circuit region,
the cell array region comprises:
an electrode structure including a plurality of electrodes sequentially stacked on a conductive body layer; and
vertical structures penetrating the electrode structure,
the peripheral circuit region comprises a remaining substrate, which is provided on the conductive body layer and is thicker than the conductive body layer,
the connection region including end portions of the plurality of electrodes and having a stepwise shape between the cell array region and the peripheral circuit region,
the second semiconductor chip is provided in such a way that a bottom surface thereof is bonded to a bottom surface of the first semiconductor chip, and
the conductive body layer of the second semiconductor chip is electrically connected to a bottom surface of the conductive body layer of the first semiconductor chip,
the connection region of the first semiconductor chip is extended from the cell array region of the first semiconductor chip in a first direction, and
the connection region of the second semiconductor chip is extended from the cell array region of the second semiconductor chip in the first direction.
17. The device of claim 16 , wherein the conductive body layer comprises poly silicon.
18. The device of claim 16 , further comprising:
an inter-chip layer provided between the conductive body layer of the first semiconductor chip and the conductive body layer of the second semiconductor chip,
wherein the conductive body layer of the first semiconductor chip is electrically connected to the conductive body layer of the second semiconductor chip via the inter-chip layer.
19. The device of claim 16 , wherein the electrode structure is provided in plural as a plurality of electrode structures, and
the semiconductor memory device further comprises a common conductive line, which is provided between the plurality of electrode structures and is connected to the conductive body layer.
20. The device of claim 16 , each of the first and second semiconductor chips further comprises a through electrode, which is provided on the peripheral circuit region and sequentially penetrates the conductive body layer and the remaining substrate,
a bottom surface of the through electrode of the first semiconductor chip is in contact with a bottom surface of the through electrode of the second semiconductor chip.