IP Library Granted Patent US 10,475,697
Granted Patent B2
US 10,475,697 · App. 15/982,949 · Granted Nov 12, 2019

Integrated memory, integrated assemblies, and methods of forming memory arrays

Inventor: Durai Vishak Nirmal Ramaswamy (Boise, ID)
Assignee: Micron Technology, Inc.
H01L21/764H01L27/0805H01L28/90H01L27/10808H01L27/11504H01L27/11507
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Quick Facts
Patent No.
US 10,475,697
App. No.
15/982,949
Granted
Nov 12, 2019
Kind
B2
Abstract

Some embodiments include an integrated memory having an array of capacitors. The array has edges. The capacitors along the edges are edge capacitors, and the other capacitors are internal capacitors. The edge capacitors have inner edges facing toward the internal capacitors, and have outer edges in opposing relation to the inner edges. An insulative beam extends laterally between the capacitors. The insulative beam is along upper regions of the capacitors. First void regions are under the insulative beam, along lower regions of the internal capacitors, and along the inner edges of the edge capacitors. Peripheral extensions of the insulative beam extend laterally outward of the edge capacitors, and second void regions are under the peripheral extensions and along the outer edges of the edge capacitors. Some embodiments included integrated assemblies having two or more memory array decks stacked on atop another. Some embodiments include methods of forming memory arrays.

Claims (26)

1. An integrated assembly, comprising:

a first memory array deck comprising a plurality of first memory cells having first capacitors containing only non-ferroelectric insulative material;

a second memory array deck comprising a plurality of second memory cells having second capacitors containing ferroelectric insulative material; and

a base supporting the first and second memory array decks, the first and second memory array decks being disposed at different elevations over the base relative to each other.

2. The integrated assembly of claim 1 , wherein the first memory array deck is over the second memory array deck.

3. The integrated assembly of claim 1 , wherein the second memory array deck is over the first memory array deck.

4. The integrated assembly of claim 1 , wherein the first capacitors are spaced from one another by void regions.

5. The integrated assembly of claim 1 , wherein the second capacitors are spaced from one another by void regions.

6. The integrated assembly of claim 1 , wherein the first capacitors are spaced from one another by void regions of the first memory array deck, and wherein the second capacitors are spaced from one another by void regions of the second memory array deck.

7. The integrated assembly of claim 1 , wherein:

the first memory cells comprise first transistors electrically coupled with the first capacitors in an arrangement XTYC; where X and Y are integers, where T is transistor and C is capacitor; and

the second memory cells comprise second transistors electrically coupled with the second capacitors in the arrangement XTYC.

8. The integrated assembly of claim 7 , wherein the arrangement XTYC is 1T1C.

9. The integrated assembly of claim 1 , wherein:

the first memory cells comprise first transistors electrically coupled with the first capacitors in a first arrangement XTYC; where X and Y are integers, T is transistor and C is capacitor;

the second memory cells comprise second transistors electrically coupled with the second capacitors in a second arrangement PTQC; where P and Q are integers, T is transistor and C is capacitor; and

wherein the second arrangement comprises a different number of transistors and/or capacitors as compared to the first memory cell arrangement.

10. The integrated assembly of claim 9 , wherein the first arrangement XTYC is 1T1C.

11. The integrated assembly of claim 9 , wherein the second arrangement PTQC is 1T1C.

12. An integrated assembly, comprising:

a first memory array deck having a plurality of first transistors electrically coupled the first capacitors in a first arrangement XTYC; where X and Y are integers, T is transistor and C is capacitor;

a second memory array deck having a plurality of second transistors electrically coupled with the second capacitors in a second arrangement PTQC; where P and Q are integers, T is transistor and C is capacitor; where P is different from X and/or Q is different from Y; and

a base supporting the first and second memory array decks, the first and second memory array decks being disposed at different elevations over the base relative to each other.

13. The integrated assembly of claim 12 , wherein the first arrangement XTYC is 1T1C.

14. The integrated assembly of claim 12 , wherein the second arrangement PTQC is 1T1C.

15. The integrated assembly of claim 12 , wherein the first capacitors comprise ferroelectric insulative material and/or the second capacitors comprise ferroelectric insulative material.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 11, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050713/0001 →
SUPPLEMENT NO. 9 TO PATENT SECURITY AGREEMENT Recorded Aug 9, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 047282/0463 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →