Method of forming semiconductor memory device
A method of forming a semiconductor memory device includes the following steps. First of all, a substrate is provided, and a plurality of gates is formed in the substrate, along a first direction. Next, a semiconductor layer is formed on the substrate, covering the gates, and a plug is then in the semiconductor layer, between two of the gates. Then, a deposition process is performed to from a stacked structure on the semiconductor layer. Finally, the stacked structure is patterned to form a plurality of bit lines, with one of the bit lines directly in contact with the plug.
1. A method of forming a semiconductor memory device, comprising:
providing a substrate;
forming a plurality of gates in the substrate, extending along a first direction;
forming a semiconductor layer on the substrate, covering the gates;
forming a protection layer on the semiconductor layer;
forming a plug hole in the semiconductor layer;
forming a conductive layer on the protection layer having a lower sunken top surface above the plug hole;
forming a plug in the semiconductor layer, between two adjacent gates, wherein the forming of the plug comprises;
performing an etching process to remove the conductive layer on the semiconductor layer till a peripheral top surface of the conductive layer is level with a top surface of the protection layer;
removing the protection layer, wherein a peripheral top surface of the plug is protruded from the top surface of the semiconductor layer, and the peripheral top surface of the plug not directly contacts the semiconductor layer to form the plug;
performing a deposition process to from a stacked structure on the semiconductor layer; and
patterning the stacked structure to form a plurality of bit lines, wherein the bit lines directly contact the semiconductor layer for electrical connection with one of the bit lines directly in contact with the plug.
2. The method of forming a semiconductor memory device according to claim 1 , wherein after the etching process, a taper protrusion is formed on the conductive layer.